NP-ST-HA Six Axis Heavy Load Piezoelectric Stage NP-ST-HAC-U
NP-ST-HA Six Axis Heavy Load Piezoelectric Stage Based on the Microsoft Agency Piezoelectric Executor achieves ultra-high resolution nanoactivity ， Closed loop control through high performance nanoserve system ， is Subnanometer Motion Resolution 、 Nanometric motion accuracy and high speed 、 High Dynamic Performance Track scan 。
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Overview
Specifications
| Parameter | Value |
|---|---|
| Axes of motion | X, Y, Z, θX, θY, θZ |
| Sensor Type | Capable Sensors |
| Drive Type | Piezoelectric Ceramic |
| Closed cycle | XY:100μm Z:70μm θXθY:±180μrad θZ:±240μrad |
| Resolution | XY:＜2nm Z:＜1nm θXθY:＜20nrad θZ:＜20nrad |
| Linearity | XY: 0.03% Z: 0.03% |
| Repeatability | XY:＜10nm Z:＜10nm θXθY:50nrad θZ:50nrad |
| Maximum Load | 35 kg |
| Platform Noise | ＜2 |
| Resonant Frequency @35Kg | Z:＞100Hz θXθY:＞100Hz |
| Material | Aluminum Alloy / Titanium Alloy |
| Dimensions | Φ475x130 Medium Φ320 |
| Quality | ＜20kg |
| Operating Temperature | 0-50 ℃ |
| Fit Controller | Nano. Servo Controller APS-203010101 |
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