Excimer Laser
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Specifications
| Parameter | Value |
|---|---|
| Wavelength [Parameters =F2] | 157 nm |
| Wavelength [Parameters =ArF] | 193 nm |
| Wavelength [Parameters =KrF] | 248 nm |
| Wavelength [Parameters =XeCl] | 308 nm |
| Wavelength [Parameters =XeF] | 351 nm |
| Maximum Energy .mJ [Parameters =F2] | 3 |
| Maximum Energy .mJ [Parameters =ArF] | 20 |
| Maximum Energy .mJ [Parameters =KrF] | 35 |
| Maximum Energy .mJ [Parameters =XeCl] | 15 |
| Maximum Energy .mJ [Parameters =XeF] | 15 |
| Energy control range [Parameters =F2] | 1~3 mJ |
| Energy control range [Parameters =ArF] | 5~20 mJ |
| Energy control range [Parameters =KrF] | 10~35 mJ |
| Energy control range [Parameters =XeCl] | 7~15 mJ |
| Energy control range [Parameters =XeF] | 7~15 mJ |
| Maximum Steady energy. 200Hz [Parameters =F2] | 2.5 |
| Maximum Steady energy. 200Hz [Parameters =ArF] | 15 |
| Maximum Steady energy. 200Hz [Parameters =KrF] | 30 |
| Maximum Steady energy. 200Hz [Parameters =XeCl] | 15 |
| Maximum Steady energy. 200Hz [Parameters =XeF] | 12 |
| Average Power W 300/600 [Parameters =F2] | 0.6/1.2 |
| Average Power W 300/600 [Parameters =ArF] | 4/7 |
| Average Power W 300/600 [Parameters =KrF] | 6/12 |
| Average Power W 300/600 [Parameters =XeCl] | 3/6 |
| Average Power W 300/600 [Parameters =XeF] | 3/6 |
| Stability Standard Offset [Parameters =F2] | <1% Maximum Repetition Rate |
| Stability Standard Offset [Parameters =ArF] | <1% Maximum Repetition Rate |
| Stability Standard Offset [Parameters =KrF] | <1% Maximum Repetition Rate |
| Stability Standard Offset [Parameters =XeCl] | <1% Maximum Repetition Rate |
| Stability Standard Offset [Parameters =XeF] | <1% Maximum Repetition Rate |
| Repeat rate [Parameters =F2] | 300/600/1000 |
| Repeat rate [Parameters =ArF] | 300/600/1000 |
| Repeat rate [Parameters =KrF] | 300/600/1000 |
| Repeat rate [Parameters =XeCl] | 300/600/1000 |
| Repeat rate [Parameters =XeF] | 300/600/1000 |
| Dynamic Life of gas in state [Parameters =F2] | 2.00E+08 |
| Dynamic Life of gas in state [Parameters =ArF] | 2.00E+08 |
| Dynamic Life of gas in state [Parameters =KrF] | 5.00E+08 |
| Dynamic Life of gas in state [Parameters =XeCl] | 1.00E+08 |
| Dynamic Life of gas in state [Parameters =XeF] | 3.00E+08 |
| Life of static gas 50% Energy [Parameters =F2] | 15days |
| Life of static gas 50% Energy [Parameters =ArF] | 60days |
| Life of static gas 50% Energy [Parameters =KrF] | 90days |
| Life of static gas 50% Energy [Parameters =XeCl] | >1year |
| Life of static gas 50% Energy [Parameters =XeF] | 90days |
| Pulse Length [Parameters =F2] | 12~15 ns |
| Pulse Length [Parameters =ArF] | 12~15 ns |
| Pulse Length [Parameters =KrF] | 12~15 ns |
| Pulse Length [Parameters =XeCl] | 12~15 ns |
| Pulse Length [Parameters =XeF] | 12~15 ns |
| Beams Dimensions [Parameters =F2] | 5 ns × 3 ns |
| Beams Dimensions [Parameters =ArF] | 8 ns × 3 ns |
| Beams Dimensions [Parameters =KrF] | 8 ns × 3 ns |
| Beams Dimensions [Parameters =XeCl] | 8 ns × 3 ns |
| Beams Dimensions [Parameters =XeF] | 8 ns × 3 ns |
| Spread out. ，mrad Full Angle [Parameters =F2] | 1 mrad × 2 mrad |
| Spread out. ，mrad Full Angle [Parameters =ArF] | 1 mrad × 2 mrad |
| Spread out. ，mrad Full Angle [Parameters =KrF] | 1 mrad × 2 mrad |
| Spread out. ，mrad Full Angle [Parameters =XeCl] | 1 mrad × 2 mrad |
| Spread out. ，mrad Full Angle [Parameters =XeF] | 1 mrad × 2 mrad |
| Cooling methods [Parameters =F2] | It's cold. |
| Cooling methods [Parameters =ArF] | It's cold. |
| Cooling methods [Parameters =KrF] | It's cold. |
| Cooling methods [Parameters =XeCl] | It's cold. |
| Cooling methods [Parameters =XeF] | It's cold. |
| Optical services [Parameters =F2] | 5.00E+08 |
| Optical services [Parameters =ArF] | 3.00E+08 |
| Optical services [Parameters =KrF] | 1.00E+09 |
| Optical services [Parameters =XeCl] | 1.00E+08 |
| Optical services [Parameters =XeF] | 3.00E+08 |
Datasheet
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