Vacuum Coating Glovebox System with T-Shaped Transfer Chamber and Water Chiller

Vacuum Coating Glovebox System with T-Shaped Transfer Chamber and Water Chiller

Supplier
Etelux
Category
Optical Production Equipment
Origin
China

The system integrates high-vacuum coating and ultralow moisture/oxygen control. A single workstation on the left and a large five-glove-port chamber on the right suit complex workflows involving coating preparation, coating, post-coating treatment and collaborative operation. Electron-beam evaporation, thermal evaporation or magnetron sputtering equipment can be integrated to produce metal, oxide and other films. A T-shaped antechamber provides clean sample transfer without disturbing the main chamber atmosphere. An external recirculating water chiller forcibly cools integrated heat-generating equipment such as the coating machine, maintaining temperature stability during long processes. Chamber dimensions: left main chamber 1200 mm × 750 mm × 900 mm; left rear chamber 400 mm × 450 mm × 900 mm with a movable tray; right chamber 2400 mm × 750 mm × 900 mm, with a reserved coating-machine connection. Front window: inclined working face with removable 8 mm safety-tempered glass, resistant to wear and corrosion with good light transmission; EPDM seal. Leakage rate 0.001vol%/h, with added leakage-rate testing. Adjustable shelving is provided, with level count and heights according to drawings. Two four-group, three-hole power terminal boards are provided: 220 V/50 Hz/10 A, with switches and integrated Chinese/European/U.S./British-standard sockets. Antechambers use EPDM seals. Large antechambers: cylindrical type 304 stainless steel, connected to the glovebox, with valve-controlled evacuation/refill; one on each side, 360 mm diameter and 600 mm long, manual piston doors and polished sliding trays. Vacuum ≤-0.1 MPa; both large and small antechambers require evacuation indication, using German Wika vacuum/pressure gauges. Additional small antechambers on the left and right are Φ150 mm × 330 mm, with vacuum ≤-0.1 MPa, evacuation indication and German Wika gauges. Large-antechamber trays are freely movable, extendable stainless steel. T-shaped antechambers use EPDM seals and cylindrical type 304 stainless steel, connect to the glovebox and permit valve-controlled evacuation/refill. The large T-shaped unit is 360 mm in diameter and 700 mm long, with a manual piston door and polished sliding tray. An additional small T-shaped unit is φ150 mm × 700 mm. Vacuum ≤-0.1 MPa, with evacuation indication for large and small units and German Wika gauges. The stainless-steel tray is freely movable and extendable. Automatic chamber purging starts when the user sets the duration and touches Start on the touchscreen, and stops automatically at the preset time. Rapid purging supports atmosphere changes and accidental water/oxygen ingress. The connection from the automatic purging valve to the chamber piping manifold uses securely attached KF25 steel-wire-reinforced plastic tubing, with an external KF25 barbed fitting. Oxygen analyzer: imported U.S. Avcray electrochemical instrument, neither domestically manufactured nor assembled domestically; third-party data are stated to support reliability. Dimensions 205 mm (L) × 80 mm (W) × 60 mm (H); range 0–1000Ppm. Alternative: GE oxy.IQ™ Oxygen Transmitter. Moisture analyzer: imported British MICHELL, selected according to the customer's operating environment, neither domestically manufactured nor assembled domestically; third-party data are stated to support reliability. Dimensions 205 mm (L) × 80 mm (W) × 60 mm (H); range 0–1000ppm. Alternative: GE VeriDri™ Dew-Point Transmitter. Solvent purification: a solvent column is connected in series to protect the purification column from organic solvents and remove volatilized solvents. The main medium is high-quality, high-efficiency activated carbon; other media can be selected for special adsorption requirements. It contains 7 KG of washed and dried high-quality, high-efficiency activated carbon. KF40 ports at the top and bottom facilitate replacement without affecting glovebox use or atmosphere; trained users can replace the medium themselves. Product certifications stated: ISO9001, CE and UL. Warranty: one year, with lifetime repair service. Application precautions: consult the Danger, Warning, Caution and related sections of the instruction manual.

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Overview

The system integrates high-vacuum coating and ultralow moisture/oxygen control. A single workstation on the left and a large five-glove-port chamber on the right suit complex workflows involving coating preparation, coating, post-coating treatment and collaborative operation. Electron-beam evaporation, thermal evaporation or magnetron sputtering equipment can be integrated to produce metal, oxide and other films. A T-shaped antechamber provides clean sample transfer without disturbing the main chamber atmosphere. An external recirculating water chiller forcibly cools integrated heat-generating equipment such as the coating machine, maintaining temperature stability during long processes. Chamber dimensions: left main chamber 1200 mm × 750 mm × 900 mm; left rear chamber 400 mm × 450 mm × 900 mm with a movable tray; right chamber 2400 mm × 750 mm × 900 mm, with a reserved coating-machine connection. Front window: inclined working face with removable 8 mm safety-tempered glass, resistant to wear and corrosion with good light transmission; EPDM seal. Leakage rate 0.001vol%/h, with added leakage-rate testing. Adjustable shelving is provided, with level count and heights according to drawings. Two four-group, three-hole power terminal boards are provided: 220 V/50 Hz/10 A, with switches and integrated Chinese/European/U.S./British-standard sockets. Antechambers use EPDM seals. Large antechambers: cylindrical type 304 stainless steel, connected to the glovebox, with valve-controlled evacuation/refill; one on each side, 360 mm diameter and 600 mm long, manual piston doors and polished sliding trays. Vacuum ≤-0.1 MPa; both large and small antechambers require evacuation indication, using German Wika vacuum/pressure gauges. Additional small antechambers on the left and right are Φ150 mm × 330 mm, with vacuum ≤-0.1 MPa, evacuation indication and German Wika gauges. Large-antechamber trays are freely movable, extendable stainless steel. T-shaped antechambers use EPDM seals and cylindrical type 304 stainless steel, connect to the glovebox and permit valve-controlled evacuation/refill. The large T-shaped unit is 360 mm in diameter and 700 mm long, with a manual piston door and polished sliding tray. An additional small T-shaped unit is φ150 mm × 700 mm. Vacuum ≤-0.1 MPa, with evacuation indication for large and small units and German Wika gauges. The stainless-steel tray is freely movable and extendable. Automatic chamber purging starts when the user sets the duration and touches Start on the touchscreen, and stops automatically at the preset time. Rapid purging supports atmosphere changes and accidental water/oxygen ingress. The connection from the automatic purging valve to the chamber piping manifold uses securely attached KF25 steel-wire-reinforced plastic tubing, with an external KF25 barbed fitting. Oxygen analyzer: imported U.S. Avcray electrochemical instrument, neither domestically manufactured nor assembled domestically; third-party data are stated to support reliability. Dimensions 205 mm (L) × 80 mm (W) × 60 mm (H); range 0–1000Ppm. Alternative: GE oxy.IQ™ Oxygen Transmitter. Moisture analyzer: imported British MICHELL, selected according to the customer's operating environment, neither domestically manufactured nor assembled domestically; third-party data are stated to support reliability. Dimensions 205 mm (L) × 80 mm (W) × 60 mm (H); range 0–1000ppm. Alternative: GE VeriDri™ Dew-Point Transmitter. Solvent purification: a solvent column is connected in series to protect the purification column from organic solvents and remove volatilized solvents. The main medium is high-quality, high-efficiency activated carbon; other media can be selected for special adsorption requirements. It contains 7 KG of washed and dried high-quality, high-efficiency activated carbon. KF40 ports at the top and bottom facilitate replacement without affecting glovebox use or atmosphere; trained users can replace the medium themselves. Product certifications stated: ISO9001, CE and UL. Warranty: one year, with lifetime repair service. Application precautions: consult the Danger, Warning, Caution and related sections of the instruction manual.

Specifications

ParameterValue
Boxes - Left Main Boxes - Dimensions [Left main box]1200mm×750mm×900mm
Box - Back of left - Size [Back of the left box.]400mm×450mm×900mm
Box - Right Box - Size [Right box]2400mm×750mm×900mm
Box - Left Back Box - Tray [Back of the left box.]Move Tray
Box - Right Box - Connection [Right box]Preserve membrane interface
Box - StructureTotal stainless steel structure (Type 304)
Box - thickness3 mm
Box - Volume2.6 m³
Box - Front Window - Glass thickness8 mm
Boxes - Front Window - MaterialsSafe steel glass
Boxes - Front Window - Seal CircleThree dollars for a bcc seal.
Boxes - Gloves8 in
Boxes - Gloves - MaterialsHard aluminium alloy gloves (combustion-resistant, aluminium anode oxide, electrolytic and organic solvent corrosion resistance)
Boxes - Gloves Ports - caliber220 mm
Boxes - Gloves - MaterialsOriginal butyl rubber imports, United States
Box - Glove - Thickness0.4 mm
Box - Filter - Aperture0.3 μm
Boxes - LightingThe box is equipped with a reaction-proof light-saving light, soft light.
Boxes - leakage rate0.001 vol%/h
Box - Wireboard Configuration2 4-group tri-coon power panels
Box-wireboard power and interface220V/50Hz/10A, with switches, country/European/American/British interfaces
Boxes - Standard InterfacesMultiple standard KF-40 interfaces
Transition module (tripla bc seal) - Large transition module - StructureCylinder
Transition module (tripla bc seal) - Large transition module - MaterialsType 304 stainless steel
Transition module (tripla bc seal) - Large transition module - GateManual piston door.
Transition module (tripla bc seal) - Large transition module - TraySlideable Tray
Transition module (tripla bc seal) - Large transition module - vacuum [Large, small transition module requires vacuum belts]≤-0.1 MPa
Transition module (tripla bc seal) - Large transition module - Vacuum pressure tableWika, Germany
Transition module (tripla bc seal) - small transition module - materialsstainless steel type 304 (1.4301)
Transition module (tripla bc seal) - small transition module - thickness2 mm
Transition module (tripla bc seal) - small transition module - size [Right and right.]Φ150mm×330mm
Transition module (tripla bc seal) - small transition module - vacuum [Large, small transition module requires vacuum belts]≤-0.1 MPa
Transition module (tripla bc seal) - small transition module - vacuum pressure tableWika, Germany
Transition module (tripla bc seal) - Large transition module - Tray - Materials [Large over-class configuration]Stainless Steel
Transition module (tripla bc seal) - Large transition module - Tray - Movement [Large over-class configuration]Free to move extension
T-form transition module (tridollar bc seal) - structureCylinder
T-form transition module (tripla bc seal) - materialsType 304 stainless steel
T-form transition module (tripla bc seal) - large transition module - size360 mm diameter, 700 mm long
T-shaped transition module (tripla bc seal) - small transition module - sizeφ150mm×700mm
T-form transition module (trirupt bc seal) - doorManual piston door.
T-T-Turkage (tridollar bc-sealed)-TurkSlideable Tray
T-form transition module (tripla bc seal) - vacuum [Large, small transition module requires vacuum belts]≤-0.1 MPa
T-form transition module (tripla bc seal) - vacuum pressure tableWika, Germany
Purge system - valve to box pipe integrationKF25 has a strong connection to the steel silk-sweet tube.
Cleaning system -- external interfaceKF25 tower.
Analyzers - oxygen analysers - dimensions205 mm(L) x 80 mm(W) x 60 mm(H)
Analyzers - oxygen analysers - range measurement0-1000 Ppm
Analyzer-water analyser-size205 mm(L) x 80 mm(W) x 60 mm(H)
Analyzers - hydrometric analysers - range of measurements0-1000 ppm
Solvent purification system - mediaQuality, high-efficiency, active carbon
Solvent purification systems - fillingsHigh-quality, high-quality activated charcoal dryed with water.
Solvent purification systems - filled quantity7 KG
Solvent purification system - interface [Up and down the pole.]KF40 Interface

Key Features

Patented module: features and advantages of the Etelux patented flange window with double O-ring seals (patent number CN104260114B). The window flange is laser-cut from a single thick stainless steel plate into a high-strength rectangular ring that resists impact and compressive deformation. The integral flange window and annular sealing grooves are machined in a single setup on a large gantry machining center. Two dovetail sealing grooves are provided, with flatness of the sealing support surfaces and groove bottoms <0.05mm/m. The flange window is joined to the enclosure by cooled continuous welding, and the complete welds undergo strict non-destructive inspection to ensure leak-free welded joints. The double-groove vacuum-isolation sealing arrangement uses two integral O-rings embedded in integral annular grooves. Both the inner and outer seals are seamless. The vacuum between the two seals effectively prevents airborne H₂O, O₂ and N₂ molecules from diffusing into the glovebox and toxic molecules from diffusing out. The enclosure leak rate is <0.0005vol%/h, achieving the stated leak-free sealing effect.

Datasheet

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Supplier Information

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Etelux
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Etelux Inert Gas System (Beijing) Co., Ltd. was established in February 1998, introducing and absorbing European and American technologies to develop inert gas protection equipment, used for glove boxes in science and technology education, university research, lithium battery industry, laser industry, etc., filling the history of long-term dependence on imports in China, greatly reducing procurement costs, and deeply trusted by users. We have always adhered to the business philosophy of "customer first, excellence" and the principle of "customer first" to provide quality services to our customers. We bravely shoulder the responsibilities of the times and social missions, provide customers with higher value service experiences, focus on research and development, continuous innovation, and maintain a leading position in the glove box industry. Etelux Inert Gas System (Beijing) Co., Ltd. has a registered capital of 50 million yuan and owns two major production bases covering an area of more than 10,000 square meters. The company produces various products such as biochemical experimental glove boxes, lithium battery glove boxes, glove boxes for special lamp production, solvent filtration systems, solvent purification systems, gas purification systems, etc. They have been adopted by more than 1,000 customers in aerospace, weapons, military, power supply, biochemistry, physics, metallurgy, electronics, materials and other fields. In recent years, more than 5,000 sets of various equipment not only cover various provinces and regions in China, but also cover Europe and the United States. Its service network has covered major cities in China, and has sales and after-sales service institutions in Beijing, Shanghai, Wuhan, and Guangzhou.

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Vacuum Coating Glovebox System with T-Shaped Transfer Chamber and Water Chiller
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