intelliSCAN III Series Established, Stable High-Performance Galvanometer Scanners intelliSCAN III 20
intelliSCAN III is a high-performance digitally controlled scanning galvanometer series for industrial laser processing. Proven scanning technology and digital servo control balance dynamic performance, positioning accuracy, repeatability, and long-term operating stability. Long industrial use has demonstrated a good balance of scanning speed, positioning accuracy, repeatability, and long-term stability. It can be combined with various lasers, F-Theta scan lenses, and laser processing control systems for marking, engraving, welding, cutting, drilling, precision processing, and additive manufacturing. Note: maximum laser power refers to standard system data at 1064 nm and 100% duty cycle; 20 mm and 30 mm models require air cooling. For system integration, select the laser according to material, wavelength, and power; standard coatings cover mainstream industrial laser wavelengths. Select an intelliSCAN III scanner of 10 / 14 / 20 / 30 mm according to incident beam diameter, power, and scanning speed; a modular structure is available for integration without a housing. Select the F-Theta scan lens according to scan field size, working distance, and spot size. The control system supports SL2-100 and XY2-100 Enhanced digital interfaces and can use SCANLAB RTC control boards and laserDESK software. Water or air cooling is optional; 20 mm and 30 mm high-power applications require air cooling.
Overview
Specifications
| Parameter | Value |
|---|---|
| Clear Aperture (Entrance Aperture) | 20 mm |
| Position Sensing Method | Analog position detector |
| Standard Coating (Wavelength Range) | YAG and fiber, green, UV, DUV and CO2 lasers |
| Optional Coatings | Multiwavelength, broadband, short-pulse and polarization-maintaining coatings |
| Maximum Laser Power [Standard system; 100% duty cycle; 1064 nm; with air cooling] | 1000 W @ 1064 nm (with air cooling) |
| Typical Scan Angle [Optical angle] | ±0.35 rad (optical angle) |
| Scan Field Size | 60 mm × 60 mm |
| Typical Spot Size | 16 µm |
| Number of Preinstalled Tuning Modes | Up to 3 types |
| Typical Tuning Modes | Fast vector tuning |
| Tracking Error | 0.32 ms |
| Marking Speed | 1.0 m/s |
| Positioning Speed | 11.0 m/s |
| Writing Speed (High-Quality Mode) | 230 cps |
| Writing Speed (Good-Quality Mode) | 340 cps |
| Step Response Time [1% full scale] | 0.70 ms |
| Step Response Time [10% full scale] | 1.9 ms |
| Repeatability [RMS] | < 2 µrad |
| Maximum Positioning Resolution | 18 bit |
| Nonlinearity [44°] | < 0.9 mrad / 44° |
| Temperature Drift (Zero Offset) | < 20 µrad/K |
| Temperature Drift (Gain) | < 15 ppm/K |
| Hourly Drift (Zero Offset) | < 100 µrad |
| Hourly Drift (Gain) | < 100 ppm |
| Gain Error | < 5 mrad |
| Zero Offset Error | < 5 mrad |
| Servo Control | Digital Servo Control Board |
| Control Interface | Number SL2-100; Number XY2-100 Enhanced |
| Advanced Diagnostics | Supports (iDRIVE) |
| Power Supply Requirements | 30 V DC, maximum 6 A; 48 V DC, maximum 6 A |
| Scanning Axes | 2-axis system |
| Housing Type | Standard: scanning galvanometer; optional: modular structure without housing |
| Connector Position | Beam entrance side |
| Weight (Without Field Lens, Standard Housing) | 5.8 kg |
| Dimensions (L × W × H, Standard Housing) | 206.9 mm × 140 mm × 180 mm |
| Beam Offset | 25.25 mm |
| Water Cooling | Optional |
| Air Cooling | Optional |
| Operating Temperature | 25 °C ± 10 °C |
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Key Features
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