Microscopic Reflectance Film Thickness Measurement Instrument MetronFilm-MS
MetronFilm-MS is a professional microscope-scale film-thickness inspection system using noncontact optical technology for rapid, precise measurement of film thickness and optical constants in small regions. MetronFilm-MS combines an internally developed high-resolution spectrometer and powerful intelligent algorithms with a small measurement spot and objectives of different magnifications. It nondestructively measures coating thickness and optical constants (n&k) in transparent or semitransparent microregions and precision small parts, and provides visual sample alignment for convenient identification and accurate characterization of microscopic samples.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Wavelength Range | Optional 190 - 1100nm or 380-1100nm |
| Light Source | Halogen Lamp + Deuterium Lamp, or Halogen Lamp |
| 5X Objective Thickness Measurement Range | 15nm-60μm@VIS |
| 10X Objective Thickness Measurement Range | 15nm-60μm@VIS，2nm-60μm@UV+VIS |
| 15X Objective Thickness Measurement Range | 15nm-60μm@VIS，2nm-60μm@UV+VIS |
| 50X Objective Measurement Range | 20nm-2μm@VIS |
| Thickness Requirements for Measuring n and k | 50nm |
| Accuracy | 2nm@≦1000nm， or 0.2%@≧1000nm |
| Accuracy | 0.02nm |
| Stability | 0.05nm |
| Sample Size | maximum 300mm |
| Microregion Display | Supported |
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