FlaTester Flatness Measurement Instrument Family FT100
In modern precision manufacturing, single-line scanners and coordinate measuring machines collect too little data to determine flatness over an entire surface. The FlaTester flatness instrument measures complete part surfaces without contact in seconds, accommodating different sizes and complex shapes. FlaTester has 5nm resolution and 50nm accuracy, enabling rapid, precise measurement of flatness, profile, radius, and other surface parameters across various materials and surface finishes.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Structural Configuration | Inverted |
| Measurement Method | Grazing incidence |
| Light Source | Helium-neon laser (632.8nm) |
| Camera | Target format 1/1.2″, effective resolution 1.2KX1.2K |
| Effective Clear Aperture | 100mm |
| Sample Size | 25-100mm |
| Measurement Range | >100μm |
| Accuracy | 50nm |
| Repeatability [Standard deviation] | 15nm (standard deviation) |
| Measurement Time | 5 s |
| Measurement Data Points | Up to 230,000 points |
| Measurable Materials | Semiconductor wafers, LCD masks, glass, metals, composites, ceramics, etc. |
| Measurable Surfaces | Machined, ground, polished, supersmooth surfaces, etc. |
| Sample Reflectance [85° Angle of Incidence] | 85° Angle of Incidence R>10% |
| Sample Roughness Ra | Ra<1.0μm |
| Instrument Dimensions [Length, width, and height] | 700 mm × 260 mm × 720 mm |
| Instrument Weight | 96KG |
| Power Supply | 100-240VAC，50/60Hz |
| Operating Ambient Temperature | 15℃-30℃ |
| Rate of Temperature Change | <1.0℃/30min |
| Humidity | No Greater Than 70% |
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