Reflectometric Film Thickness Measurement Instruments MetronFilm
The MetronFilm reflectometric film thickness gauge is a professional instrument for precise and rapid thin-film thickness inspection using noncontact optical technology. Its independently developed high-resolution spectrometer and powerful intelligent algorithms enable nondestructive measurement of thickness and optical constants of transparent or translucent films.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Wavelength Range | 380~1100nm |
| Light Source | Built-in halogen lamp |
| Thickness Measurement Range [Material-dependent] | 15nm ~ 260μm |
| Minimum Thickness for n&k Measurement [Material-dependent] | 50nm |
| Accuracy [Material-dependent] | 2nm @ ≤1000nm， or 0.2% @ ≥1000nm |
| Accuracy [Over 10 consecutive days, an 800nm-thick SiO₂-on-Si film is measured 100 times daily; this value is the mean of the standard deviation values of these daily averages (1σ)] | 0.02nm |
| Stability [Over 10 consecutive days, an 800nm-thick SiO₂-on-Si film is measured 100 times daily; this value is 2 times the standard deviation of these daily averages (2σ)] | 0.05nm |
| Spot Size | 1.5mm |
| Sample Size | Diameter from 1mm to 300mm or larger |
| Measurement Speed | Less than 1s for a single layer |
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Key Features
Datasheet
Supplier Information
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