Suhui MST HDXL310 and Suhui MST FHDXL310 Vertical Laser Plane Interferometers

Suhui MST HDXL310 and Suhui MST FHDXL310 Vertical Laser Plane Interferometers

Supplier
Shineoptics
Part Number
素绘MST HDXL310
Category
Interferometers
Origin
China

Under stringent requirements, components must be measured in their operating orientation, as with many windows, mirrors, and semiconductor wafers. The Suhui XL310 has a clear aperture of 310mm. Its objective is mounted above, with the optical path directed downward, making it suitable for measuring samples placed flat.

Specification Snapshot
Dimensions [Length, width, and height]
1200 mm × 1200 mm × 2040 mm
Weight [Interferometer]
300kg
Weight [Air-Floating Platform]
1000kg
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Overview

Under stringent requirements, components must be measured in their operating orientation, as with many windows, mirrors, and semiconductor wafers. The Suhui XL310 has a clear aperture of 310mm. Its objective is mounted above, with the optical path directed downward, making it suitable for measuring samples placed flat.

Specifications

ParameterValue
Measurement MethodFizeau Interferometry Principle
Effective Clear Aperture310mm
Light SourceWavelength-tunable laser, center wavelength 632.8nm
CameraSensor size 2/3″, effective pixels 2.4Kx2.4K
Lateral Resolution ITF [@1.74lp/mm; phase-shifting mode]ITF>0.7@1.74lp/mm (phase-shifting mode)
Measurement ModeSirius vibration-resistant wavelength phase shifting FT-FPSI and multiple-surface separation technology MST
RMS Repeatability [2σ]λ/5000
RMS Wavefront Repeatability [mean+2σ]<0.6nm
Continuous Zoom Ratio [Fixed Magnification]1-fold fixed magnification
Alignment Method [Alignment Angle ±1°;AFAS Optional]Fast digital alignment system DAS, alignment angle ±1°; optional fully automatic fringe alignment system AFAS enables automatic fringe finding and measurement
Pupil Focus Adjustment Range±2.5m
Transmission Reference MaterialImported fused silica with homogeneity better than 4ppm and stress better than 4nm/cm
Transmission Reference Flat PVr [Optional dynamic coating; sample reflectance 2%-99%; source surface-figure-error data from three-flat rotation absolute measurement provided]PVr: better than λ/20; source surface-figure-error data from three-flat rotation absolute measurement provided; optional dynamic coating for samples with reflectance 2%-99%
Flat Reflection Reference MaterialImported microcrystalline material
Reflection Reference Flat PVr [Provides source data of surface-figure errors from three-flat rotation absolute measurement]PVr: better than λ/20; source surface-figure-error data from three-flat rotation absolute measurement provided
Power Supply100-240VAC,50/60Hz
Dimensions [Length, width, and height]1200 mm × 1200 mm × 2040 mm
Weight [Interferometer]300kg
Weight [Air-Floating Platform]1000kg

Key Features

Large measurement range: new optics improve system transfer function and extend flatness measurement to 140μm (FHD) for inline semiconductor flatness and warpage monitoring. Optimized vertical design compensates during fabrication for gravity-induced deformation (Power) of horizontally placed flat reference optics. Sirius FPSI vibration-resistant phase shifting removes vibration-induced ripple modulation. Integrated vibration isolation and structure provide stable, compact measurement; a built-in vacuum generator supports vacuum chucks and wafers. Data segmentation divides by specified rows and columns, computing valid pixels, PV, RMS, LTV, mean phase, and regional statistics, with overlapping or spaced subregions.

Datasheet

Product Datasheet
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Supplier Information

Sh
Shineoptics
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Founded in June 2009, Shanghai Qianyao Optical Technology Co., Ltd. is located in Jiading District, Shanghai, and is a high-tech enterprise. The company specializes in the development and sales of optical testing instruments, primarily mid-to-high-end laser interferometers and custom products, serving metrology, scientific research, optical cold processing, and mobile phone panel inspection fields. Its customers include universities, research institutes, Huawei, Sony, and Hikvision. The company masters core laser interferometer technologies, achieving in-house production of optical components, and possesses capabilities in classical optical cold processing, high-efficiency optical cold processing, optical polishing, and ion beam processing. With an annual production capacity of 700 interferometers and cumulative sales exceeding 2000 units, its products are sold domestically and exported to Japan, Korea, the USA, and Europe.

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Suhui MST HDXL310 and Suhui MST FHDXL310 Vertical Laser Plane Interferometers
Shineoptics · Interferometers
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