Guyu 300 Spherical Stitching Laser Interferometer

Guyu 300 Spherical Stitching Laser Interferometer

Supplier
Shineoptics
Part Number
谷雨300
Category
Interferometers
Origin
China

The name Guyu refers to rain nourishing the hundred grains: plentiful, timely rainfall allows grain crops to thrive. Amid unprecedented changes of the past century, Shineoptics named the new product Guyu to express its wish that the company's pioneering spirit and innovation would help Chinese optics overcome foreign product sales bans and achieve independence, and that the Guyu series would become a vital source of the company's continuing progress. The Guyu 300 spherical stitching laser interferometer, released by Shineoptics in 2022, is the first product in the Guyu series. The Guyu 300 uses an integrated air-float vibration-isolation structure. Computer software automatically plans the stitching scheme, and a computer-controlled 5-axis mechanism locates images and automatically performs stitching measurements. Dedicated Sirius stitching-interferometer software then processes the data for high-precision surface-figure error measurement. For applications including lithographic objectives and ultraviolet microscope objectives, the Guyu 300 helps customers measure full-size surface-figure errors of 300mm-aperture convex lenses, hemispherical lenses, and spherical lenses.

Specification Snapshot
Dimensions [Length, width, and height]
1.5 m × 1.1 m × 2.8 m
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Overview

The name Guyu refers to rain nourishing the hundred grains: plentiful, timely rainfall allows grain crops to thrive. Amid unprecedented changes of the past century, Shineoptics named the new product Guyu to express its wish that the company's pioneering spirit and innovation would help Chinese optics overcome foreign product sales bans and achieve independence, and that the Guyu series would become a vital source of the company's continuing progress. The Guyu 300 spherical stitching laser interferometer, released by Shineoptics in 2022, is the first product in the Guyu series. The Guyu 300 uses an integrated air-float vibration-isolation structure. Computer software automatically plans the stitching scheme, and a computer-controlled 5-axis mechanism locates images and automatically performs stitching measurements. Dedicated Sirius stitching-interferometer software then processes the data for high-precision surface-figure error measurement. For applications including lithographic objectives and ultraviolet microscope objectives, the Guyu 300 helps customers measure full-size surface-figure errors of 300mm-aperture convex lenses, hemispherical lenses, and spherical lenses.

Specifications

ParameterValue
Interferometer Aperture152mm
Maximum Test Aperture300mm
Light SourceFrequency-Stabilized Helium-Neon Laser
Test Wavelength632.8nm
Coherence length>100m
Effective Camera Resolution2kx2k
Lateral Resolution>3lp/mm
Optical Imaging Magnification1~6 ×
Alignment SystemTwo-Point Crosshair Alignment, Alignment Angle ±3°
Spherical Lens Accuracy PVPV: better than λ/20
Phase-Shifting MethodMechanical Phase Shifting
RMS Simple Repeatability<0.06nm
RMS Wavefront Repeatability<0.6nm
Motion MechanismMotorized Five-Axis System: X, Y, Z Translation, Swing and Rotation
Z-Axis Travel850mm
Power Supply and Power100-240VAC,2KW
Dimensions [Length, width, and height]1.5 m × 1.1 m × 2.8 m
Weight1600KG

Applications

Full-size surface figure error measurement of 300mm-aperture convex lenses, hemispherical lenses and spherical lenses for lithography objectives, ultraviolet microscope objectives and related fields

Key Features

Wider field: computer-controlled 5-axis stitching enables spherical-lens inspection with large aperture, large radius and large NA. Intelligent subaperture planning: dedicated software asks for radius, diameter, concavity/convexity and selected lens, then calculates sphere angle and coverage and assists planning, as intuitively as CAD drawing. The planned canvas maps to the main interface; clicking a subaperture automatically moves the rotary stage/interferometer translation mechanism to measure it. Higher lateral resolution: stitching surveys the whole while each subaperture reveals local details. Higher accuracy: proven G150HD/interferometer-lens system errors are calibrated by absolute testing and automatically subtracted from each subaperture measurement.

Datasheet

Product Datasheet
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Supplier Information

Sh
Shineoptics
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Founded in June 2009, Shanghai Qianyao Optical Technology Co., Ltd. is located in Jiading District, Shanghai, and is a high-tech enterprise. The company specializes in the development and sales of optical testing instruments, primarily mid-to-high-end laser interferometers and custom products, serving metrology, scientific research, optical cold processing, and mobile phone panel inspection fields. Its customers include universities, research institutes, Huawei, Sony, and Hikvision. The company masters core laser interferometer technologies, achieving in-house production of optical components, and possesses capabilities in classical optical cold processing, high-efficiency optical cold processing, optical polishing, and ion beam processing. With an annual production capacity of 700 interferometers and cumulative sales exceeding 2000 units, its products are sold domestically and exported to Japan, Korea, the USA, and Europe.

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