Guyu 300 Spherical Stitching Laser Interferometer
The name Guyu refers to rain nourishing the hundred grains: plentiful, timely rainfall allows grain crops to thrive. Amid unprecedented changes of the past century, Shineoptics named the new product Guyu to express its wish that the company's pioneering spirit and innovation would help Chinese optics overcome foreign product sales bans and achieve independence, and that the Guyu series would become a vital source of the company's continuing progress. The Guyu 300 spherical stitching laser interferometer, released by Shineoptics in 2022, is the first product in the Guyu series. The Guyu 300 uses an integrated air-float vibration-isolation structure. Computer software automatically plans the stitching scheme, and a computer-controlled 5-axis mechanism locates images and automatically performs stitching measurements. Dedicated Sirius stitching-interferometer software then processes the data for high-precision surface-figure error measurement. For applications including lithographic objectives and ultraviolet microscope objectives, the Guyu 300 helps customers measure full-size surface-figure errors of 300mm-aperture convex lenses, hemispherical lenses, and spherical lenses.
Overview
Specifications
| Parameter | Value |
|---|---|
| Interferometer Aperture | 152mm |
| Maximum Test Aperture | 300mm |
| Light Source | Frequency-Stabilized Helium-Neon Laser |
| Test Wavelength | 632.8nm |
| Coherence length | >100m |
| Effective Camera Resolution | 2kx2k |
| Lateral Resolution | >3lp/mm |
| Optical Imaging Magnification | 1~6 × |
| Alignment System | Two-Point Crosshair Alignment, Alignment Angle ±3° |
| Spherical Lens Accuracy PV | PV: better than λ/20 |
| Phase-Shifting Method | Mechanical Phase Shifting |
| RMS Simple Repeatability | <0.06nm |
| RMS Wavefront Repeatability | <0.6nm |
| Motion Mechanism | Motorized Five-Axis System: X, Y, Z Translation, Swing and Rotation |
| Z-Axis Travel | 850mm |
| Power Supply and Power | 100-240VAC,2KW |
| Dimensions [Length, width, and height] | 1.5 m × 1.1 m × 2.8 m |
| Weight | 1600KG |
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