Optical Flats and Reference Flats
Optical flats use optical interference to measure gauge blocks and inspect the wringing ability and flatness of gauge blocks, gauges, sealing faces, measuring instruments, and measuring-tool surfaces. They may have single or double working surfaces and are classified as reference or working flats, working flats in grades 1 and 2 and reference flats in grades 1 and 2. The figure shows their form. Qianyao Optics supplies a full range complying with the national metrological verification regulation JJG28-2000. Applications include optical factories, industrial metrology rooms, precision workshops, on-site valve-sealing-face inspection, universities, and research institutions for flatness measurement. Standard dimensions: Flat Size | D | H | t | b 30 | 30±0.8 | 10±1.35 | 10+0.4 | 6~8 45 | 45±0.8 | 15±1.35 | 10+0.4 | 10 60 | 60±0.95 | 20±1.65 | 10+0.4 | 10 80 | 80±0.95 | 20±1.65 | 1.50+0.4 | 10 100 | 100±1.1 | 25±1.65 | 1.50+0.4 | 10 150 | 150±1.25 | 30±1.65 | 20+0.4 | 10 200 | 200±1.45 | 40±1.95 | 30+0.4 | 10 Reference flats: A 150mm grade 1 flat can be certified as a reference flat. For grade 1, expanded measurement uncertainty U (k=3 or p=0.99) is no more than 0.010μm, flatness within the effective diameter no more than 0.03μm, difference between any two sections no more than 0.015μm, and flatness within (2/3)d no more than 0.015μm. For grade 2, uncertainty U (k=3 or p=0.99) is no more than 0.020μm, effective-diameter flatness no more than 0.05μm, difference between sections no more than 0.03μm, and flatness within (2/3)d no more than 0.03μm. The source repeats: effective-diameter flatness no more than 0.03μm, difference between any two sections no more than 0.015μm; within (2/3)d, the flatness deviation direction should match the overall deviation, and both sections should have matching deviation directions.
Overview
Specifications
| Parameter | Value |
|---|---|
| Effective Diameter d [Optical Flat ; Specifications =30mm] | 25 mm |
| Flatness [Optical Flat; Size=30mm; grade 1; within d] | 0.03 μm |
| Flatness [Optical Flat; Size=30mm; grade 2; within d] | 0.1 μm |
| Flatness [Optical Flat; Size=30mm; grade 2; within (2/3)d; central region of the flat] | 0.05 μm |
| Effective Diameter d [Optical Flat ; Specifications =45mm] | 39 mm |
| Flatness [Optical Flat; Size=45mm; grade 1; within d] | 0.03 μm |
| Flatness [Optical Flat; Size=45mm; grade 2; within d] | 0.1 μm |
| Flatness [Optical Flat; Size=45mm; grade 2; within (2/3)d; central region of the flat] | 0.05 μm |
| Effective Diameter d [Optical Flat ; Specifications =60mm] | 54 mm |
| Flatness [Optical Flat; Size=60mm; grade 1; within d] | 0.03 μm |
| Flatness [Optical Flat; Size=60mm; grade 2; within d] | 0.1 μm |
| Flatness [Optical Flat; Size=60mm; grade 2; within (2/3)d; central region of the flat] | 0.05 μm |
| Effective Diameter d [Optical Flat ; Specifications =80mm] | 72 mm |
| Flatness [Optical Flat; Size=80mm; grade 1; within d] | 0.05 μm |
| Flatness [Optical Flat; Size=80mm; grade 1; within (2/3)d; central region of the flat] | 0.03 μm |
| Flatness [Optical Flat; Size=80mm; grade 2; within d] | 0.1 μm |
| Flatness [Optical Flat; Size=80mm; grade 2; within (2/3)d; central region of the flat] | 0.05 μm |
| Effective Diameter d [Optical Flat ; Specifications =100mm] | 92 mm |
| Flatness [Optical Flat; Size=100mm; grade 1; within d] | 0.05 μm |
| Flatness [Optical Flat; Size=100mm; grade 1; within (2/3)d; central region of the flat] | 0.03 μm |
| Flatness [Optical Flat; Size=100mm; grade 2; within d] | 0.1 μm |
| Flatness [Optical Flat; Size=100mm; grade 2; within (2/3)d; central region of the flat] | 0.05 μm |
| Effective Diameter d [Optical Flat ; Specifications =150mm] | 140 mm |
| Flatness [Optical Flat; Size=150mm; grade 1; within d] | 0.05 μm |
| Flatness [Optical Flat; Size=150mm; grade 1; within (2/3)d; central region of the flat] | 0.03 μm |
| Flatness [Optical Flat; Size=150mm; grade 2; within d] | 0.1 μm |
| Flatness [Optical Flat; Size=150mm; grade 2; within (2/3)d; central region of the flat] | 0.05 μm |
| Effective Diameter d [Optical Flat ; Specifications =200mm] | 188 mm |
| Flatness [Optical Flat; Size=200mm; grade 1; within d] | 0.08 μm |
| Flatness [Optical Flat; Size=200mm; grade 1; within (2/3)d; central region of the flat] | 0.05 μm |
| Flatness [Optical Flat; Size=200mm; grade 2; within d] | 0.12 μm |
| Flatness [Optical Flat; Size=200mm; grade 2; within (2/3)d; central region of the flat] | 0.06 μm |
| Expanded Uncertainty [Reference optical flat; grade 1; k=3 or p=0.99] | No greater than0.010μm |
| Flatness [Reference Optical Flat; grade 1; within the effective diameter] | No greater than 0.03μm |
| Flatness Difference Between Any Two Sections [Reference optical flat; grade 1] | No greater than 0.015μm |
| Flatness [Reference Optical Flat; grade 1; within (2/3)d] | No greater than 0.015μm |
| Expanded Uncertainty [Reference optical flat; grade 2; k=3 or p=0.99] | No greater than0.020μm |
| Flatness [Reference Optical Flat; grade 2; within the effective diameter] | No greater than 0.05μm |
| Flatness Difference Between Any Two Sections [Reference optical flat; grade 2] | No greater than 0.03μm |
| Flatness [Reference Optical Flat; grade 2; within (2/3)d] | No greater than 0.03μm |
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