“Suhui” MST Laser Interferometers 素绘MST HD150
Because lasers are highly coherent, both front and rear surfaces of a parallel optical plate form interference fringes with the interferometer reference, while self-interference between the two surfaces produces another fringe set. The three sets overlap and conventional methods cannot directly analyze the interferogram. Applying grease such as petroleum jelly to the rear surface is common: its refractive index near 1.5 resembles most optical glass, effectively roughening the back surface and suppressing rear-reflection fringes. This risks surface contamination and does not work for high-index glass. Multiple-surface measurement technology (MST) solves this problem using a wavelength-tunable laser. In wavelength phase shifting, phase shift depends on cavity length, so each fringe set has a distinct cavity-length-dependent frequency. The Shineoptics multiple-surface algorithm analyzes one sampled dataset to separate the topography of each parallel surface independently. A single measurement therefore directly yields front-surface figure, rear-surface figure and optical-thickness variation.
Overview
Specifications
| Parameter | Value |
|---|---|
| Measurement Method | Fizeau Interferometry Principle |
| Effective Clear Aperture | 152.4mm(6 inches ) |
| Light Source [Optional switching between point and ring light sources] | Wavelength-tunable laser, center wavelength 632.8nm, coherence length >50m; optional switching between point and ring light sources |
| Camera | Effective imaging resolution 2.4Kx2.4K, frame rate 220fps |
| System Transfer Function ITF [@3.6cycles/mm] | >0.7 @3.6cycles/mm |
| Measurement Mode | Sirius vibration-resistant wavelength phase shifting FT-PSI and multiple-surface separation technology MST |
| RMS Simple Repeatability [2σ] | <λ/10000 |
| RMS Wavefront Repeatability [mean+2σ] | <0.35nm |
| Continuous Zoom Ratio [Fixed Magnification] | 1X Fixed Magnification |
| Phase-Shifting Method | Wavelength phase shifting and MST |
| Alignment Method [AFAS Optional ; Alignment Angle ±2°] | DAS fast digital alignment system, alignment angle ±2°; optional AFAS automatic fringe alignment system enables automatic image location and measurement |
| Pupil Focus Adjustment Range | ±5.5m |
| Optical Center Height [Optional] | 108mm and 220mm Optional |
| Transmission Reference Material | Fused silica; homogeneity better than 5ppm; stress better than 5nm/cm |
| Reflection Reference Material | Glass-Ceramic |
| Small-Aperture Reference Flat PVr [Optional] | PVr: better than λ/20 and λ/40 Optional |
| Small-Aperture Reference Sphere PVr [Optional] | PVr: better than λ/20 and λ/40 Optional |
| Power Supply | 100-240VAC,50/60Hz |
| Dimensions [Length, width, and height] | 844 mm × 386 mm × 488 mm |
| Weight | 50KG |
| Operating Ambient Temperature | 15℃-30℃ |
| Rate of Temperature Change | <0.3℃/h |
| Relative humidity | No Greater Than 70% |
| Output Power | 2mw |
| Tuning Range | 200GHz |
| Separable Test Thickness | >1mm |
| Software Functions | Measurement of parallel-plane surface figure, parallel-plane optical homogeneity, and thickness difference |
| Measurable Parameters | Surface figure PV, RMS, POWER values, etc.; optical homogeneity; TTV |
Key Features
Datasheet
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