The Shineoptics "Suhui" series laser interferometers take their name from the Analects phrase "painting comes after plainness," reflecting a fundamental pursuit of high quality. The series features diffraction-limited optical design, a high-power frequency-stabilized helium-neon laser, a 4 million- or 11.6 million-pixel camera, and an ultrastable phase shifter using P1 piezoelectric ceramics. Sirius vibration-resistant phase-shifting analysis software captures fringes for calculation and analysis, enabling high-resolution measurement that reveals mid-spatial-frequency features on the sample surface and achieves internationally leading optical resolution and measurement repeatability. The series offers HD and FHD resolutions, with light sources extending from 632.8nm to ultraviolet 266nm and near-infrared 1550nm, and upright, inverted, large-aperture horizontal, and large-aperture vertical configurations.
| Parameter | Value |
| Measurement Method | Fizeau Interferometry Principle |
| Effective Clear Aperture | 152.4mm(6 inches ) |
| Light Source [Optional short-coherence laser] | Frequency-stabilized helium-neon laser (632.8nm), coherence length >300m; optional short-coherence laser |
| Camera | Effective sensor size 18.43x18.43mm, effective pixels 4Kx4K |
| Lateral Resolution [Full aperture] | Full-aperture resolved fringe count >850 pairs |
| Measurement Mode | Sirius piezoelectric vibration-resistant phase shifting FPSI and PSI |
| RMS Simple Repeatability [2σ] | <λ/10000 |
| RMS Wavefront Repeatability [mean+2σ] | <0.35nm |
| Long-Term Stability [2σ] | <2.2nm |
| Variable Magnification Zoom [Fixed Magnification] | 1X Fixed Magnification |
| Alignment Method [AFAS Optional ; Alignment Angle ±2°] | DAS fast digital alignment system, alignment angle ±2°; optional AFAS automatic fringe alignment system enables automatic image location and measurement |
| Pupil Focus Adjustment Range | ±5.5m |
| Optical Center Height | 220mm |
| Ultrahigh-Precision Reference Flat PVr | PVr: better than λ/40 |
| Ultrahigh-Precision Reference Sphere PVr | PVr: better than λ/40 |
| Reference Flat Accuracy PV | PV: better than λ/20 |
| Reference Sphere Accuracy PV | PV: better than λ/10 and λ/20 |
| Power Supply | 100-240VAC,50/60Hz |
| Dimensions [Length, width, and height] | 844 mm × 386 mm × 488 mm |
| Weight | 50KG |
| Operating Ambient Temperature | 15℃-30℃ |
| Rate of Temperature Change | <1.0℃/30min |
| Humidity | No Greater Than 70% |
| Vibration Isolation [Mechanical phase-shifting measurement mode; recommended] | A passive vibration isolation system is recommended for mechanical phase-shifting measurement mode |
| Quality Standard | GJB/J 6221-2008 |
266nm: ultraviolet optical lenses 355nm/360nm: ultraviolet optical lenses and biological detection objectives 405nm: biological detection objectives and laser reading/writing 546nm: microscope objectives and telescopes 808nm: coated visible-light lenses 940nm: TOF lenses and lidar 1053nm: laser systems 1064nm: laser crystals and near-infrared optical systems 1550nm: optical communication devices and satellite communications
Shineoptics Sirius vibration-resistant phase shifting eliminates ripples or phase modulation caused by vibration and enables high-precision testing in workshop environments with vibration levels better than VC-B. High resolution: diffraction-limited optical design achieves lateral resolution of 450 line pairs (HD) and 850 line pairs (FHD) across the full aperture, with excellent measurement capability for mid-spatial-frequency features and systems with large aberrations. Internationally competitive accuracy and repeatability, with in-house optical element manufacturing throughout the process ensuring the precision of every element. Instrument simple repeatability and wavefront repeatability both reach internationally leading levels. A full range of interferometric measurement accessories is available; reference optics incorporate models from American and Japanese manufacturers to meet various requirements, with ultrahigh-precision reference surface figure error PVr better than λ/40 or λ/50. The high-power frequency-stabilized helium-neon laser has a coherence length over 300 meters within 1 hour of operation and over 30 meters within 8 hours; frequency stability over 8 hours reaches ±0.0001nm. Stable laser intensity supports fast exposure and image capture by high-speed cameras. A short-coherence laser can be connected to measure parallel plates and eliminate self-interference, with rapid switching between helium-neon and short-coherence sources. Core components use leading international brands for excellent performance and stable quality. Large batches of phase shifters have completed tens of millions of phase shifts.
Founded in June 2009, Shanghai Qianyao Optical Technology Co., Ltd. is located in Jiading District, Shanghai, and is a high-tech enterprise. The company specializes in the development and sales of optical testing instruments, primarily mid-to-high-end laser interferometers and custom products, serving metrology, scientific research, optical cold processing, and mobile phone panel inspection fields. Its customers include universities, research institutes, Huawei, Sony, and Hikvision. The company masters core laser interferometer technologies, achieving in-house production of optical components, and possesses capabilities in classical optical cold processing, high-efficiency optical cold processing, optical polishing, and ion beam processing. With an annual production capacity of 700 interferometers and cumulative sales exceeding 2000 units, its products are sold domestically and exported to Japan, Korea, the USA, and Europe.