"Suhui" Large-Aperture Horizontal Laser Interferometer 素绘600
The "Suhui" 600/450/300mm laser interferometers have effective apertures of 600mm, 450mm and 305mm. Each uses beam expansion to form a dual-path measurement system. For the smaller path, a main unit with a 100mm (4-inch) or 150mm (6-inch) aperture can be selected; a beam-steering unit expands the beam outside the interferometer into a large-aperture plane measurement system. The smaller path can measure both plane and spherical surfaces. The larger path comes standard with a transmission reference flat, a reflection reference flat and a sample adjustment mount.
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Overview
The "Suhui" 600/450/300mm laser interferometers have effective apertures of 600mm, 450mm and 305mm. Each uses beam expansion to form a dual-path measurement system. For the smaller path, a main unit with a 100mm (4-inch) or 150mm (6-inch) aperture can be selected; a beam-steering unit expands the beam outside the interferometer into a large-aperture plane measurement system. The smaller path can measure both plane and spherical surfaces. The larger path comes standard with a transmission reference flat, a reflection reference flat and a sample adjustment mount.
Specifications
| Parameter | Value |
|---|---|
| Measurement Method | Fizeau Interferometry Principle |
| Effective Clear Aperture [Small-aperture/large-aperture combination] | 101.6(152.4) and 600mm |
| Collimated Wavefront Aberration [Small Aperture] | 0.5λ |
| Collimated Wavefront Aberration [600mm Aperture] | 2λ |
| Light Source [Mechanical Phase Shifting or MST] | Mechanical phase shifting: frequency-stabilized helium-neon laser (632.8nm), coherence length >100m; MST: wavelength-tunable laser, center wavelength 632.8nm, coherence length >100m |
| Camera | Sensor Format 2/3″, Effective Imaging Resolution 2048*2048 |
| Main Instrument Spatial Resolution [Full aperture; mechanical phase-shifting mode] | Full-aperture resolved fringe count >450 pairs (mechanical phase-shifting mode) |
| Software Algorithms | Sirius vibration-resistant phase shifting and transient carrier |
| Main Unit RMS Simple Repeatability [2δ] | <λ/10000 |
| Main Unit RMS Wavefront Repeatability [mean+2δ] | <0.35nm |
| Large-Aperture RMS Simple Repeatability [2δ] | <λ/3000 |
| Large-Aperture RMS Wavefront Repeatability [mean+2δ] | <1.5nm |
| NMST Thickness | Parallel plate thickness ≥1mm |
| Continuous Zoom Ratio | 1-6 × |
| Phase-Shifting Method | Piezoelectric ceramic mechanical phase shifting or wavelength phase shifting (with a wavelength-tunable laser) |
| Alignment Method | Two-Point Crosshair Alignment, Alignment Angle ±3° |
| Pupil Focus Adjustment Range [100 Main Unit] | ±2.5m |
| Pupil Focus Adjustment Range [150 Main Unit] | ±5.5m |
| Optical Center Height [Small Aperture] | 220mm |
| Optical Center Height [600mm Aperture] | 450mm |
| Transmission Reference Material | Nikon fused silica; homogeneity better than 5ppm; stress better than 5nm/cm |
| Reflection Reference Material | Glass-Ceramic |
| Small-Aperture Reference Flat PV | PV: better than λ/20 |
| Small-Aperture Reference Sphere PV [Optional] | PV: better than λ/10 and λ/20 Optional |
| Large-Aperture Transmission Flat PV | PV: better than λ/12 |
| Large-Aperture Reflection Flat PV | PV: better than λ/12 |
| Large-Aperture System Empty-Cavity Accuracy PV | PV: better than λ/10 |
| Power Supply | 100-240VAC,50/60Hz |
| Recommended Pneumatic Isolation Table Dimensions | 6.0 m × 2.0 m |
Key Features
Dual optical paths provide two functions: the small path measures small flats and spheres, while the large path measures large flats. Excellent mid-spatial-frequency measurement: effective resolution reaches 2048*2048. Optimized optics give the main instrument an ITF>0.7@4.5cyc/mm, clearly resolving mid-spatial-frequency surface features. Mechanical or wavelength phase shifting: vibration-resistant mechanical phase shifting uses a standard He-Ne laser, with an optional short-coherence laser for parallel plates to eliminate self-interference. The lasers switch rapidly. Wavelength shifting combines a tunable laser and WMST multiple-surface fringe-separation algorithms for parallel plates. Stable measurements amid vibration and airflow: Shineoptics Sirius vibration-resistant phase shifting and instantaneous carrier measurement remain stable under vibration and airflow disturbances. High-quality beam expanders and reference optics: Shineoptics has complete optical fabrication, assembly and alignment capabilities. Large-aperture transmission-optic fabrication and precise beam-expander alignment ensure low wavefront error; a 2-meter continuous polisher and ion-beam polisher ensure reference surface accuracy while controlling mid-spatial-frequency errors.
Datasheet
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Supplier Information
Founded in June 2009, Shanghai Qianyao Optical Technology Co., Ltd. is located in Jiading District, Shanghai, and is a high-tech enterprise. The company specializes in the development and sales of optical testing instruments, primarily mid-to-high-end laser interferometers and custom products, serving metrology, scientific research, optical cold processing, and mobile phone panel inspection fields. Its customers include universities, research institutes, Huawei, Sony, and Hikvision. The company masters core laser interferometer technologies, achieving in-house production of optical components, and possesses capabilities in classical optical cold processing, high-efficiency optical cold processing, optical polishing, and ion beam processing. With an annual production capacity of 700 interferometers and cumulative sales exceeding 2000 units, its products are sold domestically and exported to Japan, Korea, the USA, and Europe.
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