GXL300, Suhui XL300 and Suhui XL310 Vertical Laser Plane Interferometers
Under strict requirements, components must be measured in their intended use orientation, as is the case with many windows, mirrors and semiconductor wafers. GXL300 and Suhui XL300 have a clear aperture of 305mm. Their lens-above, downward optical-path structure is suitable for measuring samples laid flat.
Specification Snapshot
Dimensions [Length, width, and height]
1200 mm × 1200 mm × 2040 mm
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Overview
Under strict requirements, components must be measured in their intended use orientation, as is the case with many windows, mirrors and semiconductor wafers. GXL300 and Suhui XL300 have a clear aperture of 305mm. Their lens-above, downward optical-path structure is suitable for measuring samples laid flat.
Specifications
| Parameter | Value |
|---|---|
| Measurement Method | Fizeau Interferometry Principle |
| Effective Clear Aperture | 310mm |
| Light Source | Single-longitudinal-mode frequency-stabilized helium-neon laser (632.8nm) |
| Camera | Sensor size 2/3 inch, effective pixels 2.4Kx2.4K, frame rate 220fps |
| Lateral Resolution [Full aperture] | Full-aperture resolvable fringe count >540 pairs |
| Measurement Mode | Sirius piezoceramic mechanical phase shifting PSI and FPSI |
| RMS Repeatability [2σ] | λ/5000 |
| RMS Wavefront Repeatability [mean+2σ] | <0.6nm |
| Continuous Zoom Ratio [Fixed Magnification] | 1-fold fixed magnification |
| Alignment Method [FAS Optional ; Alignment Angle ±1°] | Fast digital alignment system DAS, alignment angle ±1°; optional fully automatic fringe alignment system FAS enables automatic fringe finding and measurement |
| Pupil Focus Adjustment Range | ±2.5m |
| Transmission Reference Material | Imported fused silica with homogeneity better than 4ppm and stress better than 4nm/cm |
| Transmission Reference Flat PVr [Optional dynamic coating to improve silicon wafer measurement contrast] | PVr: better than λ/20; optional dynamic coating improves silicon wafer measurement contrast |
| Power Supply | 100-240VAC,50/60Hz |
| Dimensions [Length, width, and height] | 1200 mm × 1200 mm × 2040 mm |
| Weight | 800Kg |
Key Features
Integrated vibration-resistant design: the isolation system and instrument structure are integrated for stable measurement and compact construction. The stage incorporates a vacuum generator, facilitating pneumatic connection for vacuum holding of measurement suction cups and wafers. Data segmentation and analysis module: a segmentation mask divides data into specified rows and columns and calculates valid pixels, PV, RMS, LTV and mean phase for each subregion, plus statistics across all regions. Supports overlapping or spaced subregion segmentation analysis. Large measurement range: a new optical design improves the system transfer function and provides a large flatness measurement range for online measurement and control of flatness and warpage in semiconductors and other fields. Optimized vertical structure: design accounts for gravity-induced deformation (Power) when the reference flat lies horizontally, with manufacturing compensation to ensure overall instrument accuracy. Sirius FPSI vibration-resistant phase shifting removes vibration-induced ripple modulation for stable, reliable measurements.
Datasheet
Product Datasheet
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Supplier Information
Founded in June 2009, Shanghai Qianyao Optical Technology Co., Ltd. is located in Jiading District, Shanghai, and is a high-tech enterprise. The company specializes in the development and sales of optical testing instruments, primarily mid-to-high-end laser interferometers and custom products, serving metrology, scientific research, optical cold processing, and mobile phone panel inspection fields. Its customers include universities, research institutes, Huawei, Sony, and Hikvision. The company masters core laser interferometer technologies, achieving in-house production of optical components, and possesses capabilities in classical optical cold processing, high-efficiency optical cold processing, optical polishing, and ion beam processing. With an annual production capacity of 700 interferometers and cumulative sales exceeding 2000 units, its products are sold domestically and exported to Japan, Korea, the USA, and Europe.
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