GXL300, Suhui XL300 and Suhui XL310 Vertical Laser Plane Interferometers

GXL300, Suhui XL300 and Suhui XL310 Vertical Laser Plane Interferometers

Supplier
Shineoptics
Part Number
GXL300
Category
Interferometers
Origin
China

Under strict requirements, components must be measured in their intended use orientation, as is the case with many windows, mirrors and semiconductor wafers. GXL300 and Suhui XL300 have a clear aperture of 305mm. Their lens-above, downward optical-path structure is suitable for measuring samples laid flat.

Specification Snapshot
Dimensions [Length, width, and height]
1200 mm × 1200 mm × 2040 mm
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Overview

Under strict requirements, components must be measured in their intended use orientation, as is the case with many windows, mirrors and semiconductor wafers. GXL300 and Suhui XL300 have a clear aperture of 305mm. Their lens-above, downward optical-path structure is suitable for measuring samples laid flat.

Specifications

ParameterValue
Measurement MethodFizeau Interferometry Principle
Effective Clear Aperture305mm
Light SourceHelium-neon laser (632.8nm)
CameraSensor size 2/3 inch, effective resolution 2Kx2K, frame rate 74fps
Lateral Resolution [Full aperture]Full-aperture resolution >450 line pairs
Measurement ModeSirius piezoceramic mechanical phase shifting PSI and FPSI
RMS Repeatability [2σ]λ/3000
RMS Wavefront Repeatability [mean+2σ]<1.5nm
Continuous Zoom Ratio [Fixed Magnification]1-fold fixed magnification
Pupil Focus Adjustment Range±2.5m
Transmission Reference MaterialImported fused silica with homogeneity better than 4ppm and stress better than 4nm/cm
Transmission Reference Flat PVrPVr: better than λ/15
Power Supply100-240VAC,50/60Hz
Dimensions [Length, width, and height]1200 mm × 1200 mm × 2040 mm
Weight800Kg

Key Features

Integrated vibration-resistant design: the isolation system and instrument structure are integrated for stable measurement and compact construction. The stage incorporates a vacuum generator, facilitating pneumatic connection for vacuum holding of measurement suction cups and wafers. Data segmentation and analysis module: a segmentation mask divides data into specified rows and columns and calculates valid pixels, PV, RMS, LTV and mean phase for each subregion, plus statistics across all regions. Supports overlapping or spaced subregion segmentation analysis. Large measurement range: a new optical design improves the system transfer function and provides a large flatness measurement range for online measurement and control of flatness and warpage in semiconductors and other fields. Optimized vertical structure: design accounts for gravity-induced deformation (Power) when the reference flat lies horizontally, with manufacturing compensation to ensure overall instrument accuracy. Sirius FPSI vibration-resistant phase shifting removes vibration-induced ripple modulation for stable, reliable measurements.

Datasheet

Product Datasheet
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Supplier Information

Sh
Shineoptics
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Founded in June 2009, Shanghai Qianyao Optical Technology Co., Ltd. is located in Jiading District, Shanghai, and is a high-tech enterprise. The company specializes in the development and sales of optical testing instruments, primarily mid-to-high-end laser interferometers and custom products, serving metrology, scientific research, optical cold processing, and mobile phone panel inspection fields. Its customers include universities, research institutes, Huawei, Sony, and Hikvision. The company masters core laser interferometer technologies, achieving in-house production of optical components, and possesses capabilities in classical optical cold processing, high-efficiency optical cold processing, optical polishing, and ion beam processing. With an annual production capacity of 700 interferometers and cumulative sales exceeding 2000 units, its products are sold domestically and exported to Japan, Korea, the USA, and Europe.

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GXL300, Suhui XL300 and Suhui XL310 Vertical Laser Plane Interferometers
Shineoptics · Interferometers
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