G100/G150/G200 Vertical Laser Plane Interferometers G100MHD
The vertical laser plane interferometer has an upright structure and clear apertures of 200mm, 150mm and 100mm. It accommodates flat-mounted planar components, multiple components mounted on a plate, and high-precision measurements. The vertical structure offers higher measurement efficiency than a horizontal arrangement. G200M, G150M and G100M are designed for metrology and research, including verification and calibration of optical flats by metrology institutions. A high-performance, long-life helium-neon laser, high-definition optics, 1-6x image magnification and precision reference flats support high-precision measurements of planar optical components. Sirius vibration-resistant phase-shifting interference-fringe analysis software is optional.
Overview
Specifications
| Parameter | Value |
|---|---|
| Structural Configuration | Upright configuration (lens above) |
| Measurement Method | Fizeau Interferometry Principle |
| Effective Clear Aperture | 101.6mm |
| Light Source | Frequency-stabilized helium-neon laser (632.8nm), coherence length >100m |
| Camera | Sensor format 2/3″, effective resolution 2Kx2K |
| Main Instrument Spatial Resolution [Full aperture] | Full-aperture resolution >450 line pairs |
| Measurement Mode | Sirius vibration-resistant phase-shifting analysis software |
| Pv Repeatability [2δ] | <λ/500 |
| RMS Repeatability [2δ] | <λ/10000 |
| Continuous Zoom Ratio | 1-6 × |
| Phase-Shifting Method | Piezoelectric ceramic mechanical phase shifting |
| Alignment Method | Two-Point Crosshair Alignment, Alignment Angle ±3° |
| Pupil Focus Adjustment Range | ±2.5m |
| Transmission Reference Flat PV | Imported fused silica, PV: better than λ/20 |
| Reflection Reference Flat PV | Imported glass-ceramic, PV: better than λ/20 |
| System Accuracy PV | PV: better than λ/20 |
| Interferometer Cavity Internal Dimensions [Length, width, and height] | 540 mm × 360 mm × 360 mm |
| Instrument Dimensions [Length, width, and height] | 640 mm × 400 mm × 1100 mm |
| Instrument Weight | 90KG |
| Power Supply | 100-240VAC,50/60Hz |
| Operating Ambient Temperature | 15℃-30℃ |
| Rate of Temperature Change | <1.0℃/30min |
| Humidity | No Greater Than 70% |
| Vibration Isolation [Mechanical phase-shifting measurement mode; recommended] | A passive vibration isolation system is recommended for mechanical phase-shifting measurement mode |
| Quality Standard | GJB/J 6221-2008 |
Applications
Key Features
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