Plasma Cleaner VPC100A
Plasma is a state of matter, also called the fourth state, distinct from the common solid, liquid, and gas states. Supplying sufficient energy to a gas ionizes it into plasma. The VPC100 plasma surface treatment system uses the properties of active plasma species to treat the surfaces of plastic, metal-based, ceramic, glass, and other workpieces for cleaning, modification, and related purposes.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Chamber Material | 316 Stainless Steel |
| Volume | 10L |
| Electrode Plate | Flat-Plate Water-Bath Electrodes |
| Electrode | Dedicated Aluminum Electrodes, Adjustable Upper/Lower Spacing |
| Processing Time per Cycle [Surface Activation Modification] | Processing Time Varies by Process; Surface Activation Modification within 5~10min |
| Operating Vacuum Level | 20~60Pa |
| Vacuum Pump Ultimate Pressure [No-Load Test] | 0.5Pa (No-Load Test) |
| Evacuation Time | ≤ 40s |
| Vacuum Venting Time | ≤ 20s |
| Plasma Generator | 13.56MHz RF Power Supply, Power Adjustable from 0~300W; Modular RF Power Supply and Impedance Device |
| Gas Supply Method | Solenoid-Valve Type |
| Flowmeter Control | 2 MFC Mass Flow Controllers |
| Flowmeter Adjustment Range [optional] | 0~300ml/min( optional ) |
| Operating Method | Manual Workpiece Loading and Unloading; One-Button Start for Automatic Control |
Applications
Key Features
Datasheet
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Supplier Information
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