Knight+ Series Picosecond deep-UV 266 nm Laser Knight-DUV-5
The Knight+ series industrial picosecond 266nm laser uses a compact integrated design and an upgraded control system for improved power stability and consistent optical performance. A proprietary picosecond fiber seed source, free-space solid-state amplification and efficient frequency conversion produce high-repetition-rate picosecond deep-ultraviolet pulses. Real-time multiphysics data monitoring and recording support remote diagnosis and predictive maintenance. Performance is benchmarked against comparable imported products. The Knight+ picosecond deep-ultraviolet laser supports custom dimensions and optical parameters, with output up to 10W and pulse frequency of 60MHz-120MHz, for semiconductor wafer-defect inspection in advanced processes.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Center Wavelength [Configuration in the same source-table column: repetition rate 60-120 MHz; single-pulse energy 40-80 nJ] | 266 nm |
| Center Wavelength [Configuration in the same source-table column: repetition rate 1-10 MHz; single-pulse energy 500-5000 nJ] | 266 nm |
| Average Power [Configuration in the same source-table column: repetition rate 60-120 MHz; single-pulse energy 40-80 nJ] | 5 W |
| Average Power [Configuration in the same source-table column: repetition rate 1-10 MHz; single-pulse energy 500-5000 nJ] | 5 W |
| Pulse Width [Configuration in the same source-table column: repetition rate 60-120 MHz; single-pulse energy 40-80 nJ] | 10~13 ps |
| Pulse Width [Configuration in the same source-table column: repetition rate 1-10 MHz; single-pulse energy 500-5000 nJ] | 10~13 ps |
| Single-pulse energy [Configuration in the same source-table column: repetition rate 60-120 MHz; single-pulse energy 40-80 nJ] | 40-80 nJ |
| Single-pulse energy [Configuration in the same source-table column: repetition rate 1-10 MHz; single-pulse energy 500-5000 nJ] | 500-5000 nJ |
| Peak Power [Configuration in the same source-table column: repetition rate 60-120 MHz; single-pulse energy 40-80 nJ] | 1.3-8 MW |
| Peak Power [Configuration in the same source-table column: repetition rate 1-10 MHz; single-pulse energy 500-5000 nJ] | 15-500 MW |
| Repetition Rate [Configuration in the same source-table column: repetition rate 60-120 MHz; single-pulse energy 40-80 nJ] | 60-120 MHz |
| Repetition Rate [Configuration in the same source-table column: repetition rate 1-10 MHz; single-pulse energy 500-5000 nJ] | 1-10 MHz |
| Power stability [RMS / Configuration in the same source-table column: repetition rate 60-120 MHz; single-pulse energy 40-80 nJ] | <1 % |
| Power stability [RMS / Configuration in the same source-table column: repetition rate 1-10 MHz; single-pulse energy 500-5000 nJ] | <1 % |
| Pulse Stability [RMS / Configuration in the same source-table column: repetition rate 60-120 MHz; single-pulse energy 40-80 nJ] | <1 % |
| Pulse Stability [RMS / Configuration in the same source-table column: repetition rate 1-10 MHz; single-pulse energy 500-5000 nJ] | <1 % |
| Beam quality M² [Configuration in the same source-table column: repetition rate 60-120 MHz; single-pulse energy 40-80 nJ] | ≤1.2 |
| Beam quality M² [Configuration in the same source-table column: repetition rate 1-10 MHz; single-pulse energy 500-5000 nJ] | ≤1.2 |
| Spot diameter [1/e² / Configuration in the same source-table column: repetition rate 60-120 MHz; single-pulse energy 40-80 nJ] | 2.0±0.3 mm |
| Spot diameter [1/e² / Configuration in the same source-table column: repetition rate 1-10 MHz; single-pulse energy 500-5000 nJ] | 2.0±0.3 mm |
| Spot roundness [Configuration in the same source-table column: repetition rate 60-120 MHz; single-pulse energy 40-80 nJ] | >90 % |
| Spot roundness [Configuration in the same source-table column: repetition rate 1-10 MHz; single-pulse energy 500-5000 nJ] | >90 % |
| Polarization method [Configuration in the same source-table column: repetition rate 60-120 MHz; single-pulse energy 40-80 nJ] | Horizontal |
| Polarization method [Configuration in the same source-table column: repetition rate 1-10 MHz; single-pulse energy 500-5000 nJ] | Horizontal |
| Polarization ratio [Configuration in the same source-table column: repetition rate 60-120 MHz; single-pulse energy 40-80 nJ] | >100:1 |
| Polarization ratio [Configuration in the same source-table column: repetition rate 1-10 MHz; single-pulse energy 500-5000 nJ] | >100:1 |
| Optical output power adjustment range [Configuration in the same source-table column: repetition rate 60-120 MHz; single-pulse energy 40-80 nJ] | 0~100 % |
| Optical output power adjustment range [Configuration in the same source-table column: repetition rate 1-10 MHz; single-pulse energy 500-5000 nJ] | 0~100 % |
| Frequency following function [Configuration in the same source-table column: repetition rate 60-120 MHz; single-pulse energy 40-80 nJ] | Supported |
| Frequency following function [Configuration in the same source-table column: repetition rate 1-10 MHz; single-pulse energy 500-5000 nJ] | Supported |
| Operating Voltage [50/60 Hz / Configuration in the same source-table column: repetition rate 60-120 MHz; single-pulse energy 40-80 nJ] | 100~240（50/60 Hz） |
| Operating Voltage [50/60 Hz / Configuration in the same source-table column: repetition rate 1-10 MHz; single-pulse energy 500-5000 nJ] | 100~240（50/60 Hz） |
| Communication Protocol [Configuration in the same source-table column: repetition rate 60-120 MHz; single-pulse energy 40-80 nJ] | RS-232, Ethernet, USB |
| Communication Protocol [Configuration in the same source-table column: repetition rate 1-10 MHz; single-pulse energy 500-5000 nJ] | RS-232, Ethernet, USB |
| Cooling method [Configuration in the same source-table column: repetition rate 60-120 MHz; single-pulse energy 40-80 nJ] | Water cooling Water |
| Cooling method [Configuration in the same source-table column: repetition rate 1-10 MHz; single-pulse energy 500-5000 nJ] | Water cooling Water |
| Operating Temperature [Configuration in the same source-table column: repetition rate 60-120 MHz; single-pulse energy 40-80 nJ] | +10~+35 °C |
| Operating Temperature [Configuration in the same source-table column: repetition rate 1-10 MHz; single-pulse energy 500-5000 nJ] | +10~+35 °C |
| Shipping dimensions [W×D×H / Configuration in the same source-table column: repetition rate 60-120 MHz; single-pulse energy 40-80 nJ] | 700 mm × 500 mm × 200 mm |
| Shipping dimensions [W×D×H / Configuration in the same source-table column: repetition rate 1-10 MHz; single-pulse energy 500-5000 nJ] | 700 mm × 500 mm × 200 mm |
| Shipping weight [Configuration in the same source-table column: repetition rate 60-120 MHz; single-pulse energy 40-80 nJ] | 70~80 kg |
| Shipping weight [Configuration in the same source-table column: repetition rate 1-10 MHz; single-pulse energy 500-5000 nJ] | 70~80 kg |
| Shipping temperature [Configuration in the same source-table column: repetition rate 60-120 MHz; single-pulse energy 40-80 nJ] | -20~+60°C |
| Shipping temperature [Configuration in the same source-table column: repetition rate 1-10 MHz; single-pulse energy 500-5000 nJ] | -20~+60°C |
| Shipping relative humidity [Configuration in the same source-table column: repetition rate 60-120 MHz; single-pulse energy 40-80 nJ] | 10~80 % |
| Shipping relative humidity [Configuration in the same source-table column: repetition rate 1-10 MHz; single-pulse energy 500-5000 nJ] | 10~80 % |
Applications
Key Features
Datasheet
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