Knight+ Series Picosecond deep-UV 266 nm Laser Knight-DUV-1.5

Knight+ Series Picosecond deep-UV 266 nm Laser Knight-DUV-1.5

Supplier
Klightlaser
Part Number
Knight-DUV-1.5
Category
UV Light Systems
Origin
China

The Knight+ series industrial picosecond 266nm laser uses a compact integrated design and an upgraded control system for improved power stability and consistent optical performance. A proprietary picosecond fiber seed source, free-space solid-state amplification and efficient frequency conversion produce high-repetition-rate picosecond deep-ultraviolet pulses. Real-time multiphysics data monitoring and recording support remote diagnosis and predictive maintenance. Performance is benchmarked against comparable imported products. The Knight+ picosecond deep-ultraviolet laser supports custom dimensions and optical parameters, with output up to 10W and pulse frequency of 60MHz-120MHz, for semiconductor wafer-defect inspection in advanced processes.

Specification Snapshot
Center Wavelength
266 nm
Average Power
1.5 W
Pulse Width
10~13 ps
Repetition Rate
60-120 MHz
Operating Temperature
+10~+35 °C
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Overview

The Knight+ series industrial picosecond 266nm laser uses a compact integrated design and an upgraded control system for improved power stability and consistent optical performance. A proprietary picosecond fiber seed source, free-space solid-state amplification and efficient frequency conversion produce high-repetition-rate picosecond deep-ultraviolet pulses. Real-time multiphysics data monitoring and recording support remote diagnosis and predictive maintenance. Performance is benchmarked against comparable imported products. The Knight+ picosecond deep-ultraviolet laser supports custom dimensions and optical parameters, with output up to 10W and pulse frequency of 60MHz-120MHz, for semiconductor wafer-defect inspection in advanced processes.

Specifications

ParameterValue
Center Wavelength266 nm
Average Power1.5 W
Pulse Width10~13 ps
Single-pulse energy12-25 nJ
Peak Power0.4-2.5 MW
Repetition Rate60-120 MHz
Power stability [RMS]<1 %
Pulse Stability [RMS]<1 %
Beam quality M²≤1.2
Spot diameter [1/e²]2.0±0.3 mm
Spot roundness>90 %
Polarization methodHorizontal
Polarization ratio>100:1
Optical output power adjustment range0~100 %
Frequency following functionSupported
Operating Voltage [50/60 Hz]100~240(50/60 Hz)
Communication ProtocolRS-232, Ethernet, USB
Cooling methodWater cooling Water
Operating Temperature+10~+35 °C
Shipping dimensions [W×D×H]700 mm × 500 mm × 200 mm
Shipping weight70~80 kg
Shipping temperature-20~+60°C
Shipping relative humidity10~80 %

Applications

Photomask defect inspection; Unpatterned wafer defect inspection; Nanopatterned wafer defect inspection

Key Features

All-in-one design; independently developed high-frequency seed source; proprietary software and hardware control system; multistage compensation for constant power output; adaptive pointing-stabilization system; real-time multiphysics data monitoring and recording; remote diagnostics and predictive maintenance; good stability and consistency.

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Supplier Information

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Klightlaser
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Founded in 2021 by Dr. Bao Qiaoliang, a globally highly cited scientist, Klight Laser has grown into a national high-tech enterprise. The company focuses on the R&D and production of ultrafast ultraviolet and deep ultraviolet lasers (wavelengths: 355nm/266nm/213nm/193nm), providing deep ultraviolet light sources for semiconductor wafer defect detection (particle detection, bright/dark field detection) or mask inspection equipment. Klight's high-repetition-rate picosecond deep ultraviolet lasers fully match the technical specifications of international counterparts, independently developed with multiple core patented technologies and supplemented by intelligent control systems, offering customized light source matching services for domestic wafer inspection equipment integrators. Additionally, the company provides customized flexible micro-machining solutions in the form of laser modules, and has expanded into multiple application fields such as new energy, pan-semiconductor, and medical aesthetics.

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Knight+ Series Picosecond deep-UV 266 nm Laser Knight-DUV-1.5
Klightlaser · UV Light Systems
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