177/193nm Vacuum Ultraviolet Laser USA: Coherent/COMPex-F2
177/193nm vacuum-ultraviolet laser: an exceptionally long focusing length (~45 mm), small focal spot (~0.76 μm), submicrometer spatial resolution (~760 nm), ultrahigh energy resolution (~0.3 meV) and ultrahigh brightness (~355 MWm-2). Quartz crystal with periodic phase-addition technology produces 177 nm output. An international invention patent supports short wavelength, high power, small equipment size and low cost.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Generation Method | ArF Excimer Laser |
| Frequency-Conversion Material | —— |
| Wavelength | 157 nm |
| Max Power | 1.6 W |
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Key Features
Datasheet
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