Industrial Two-Dimensional Film Thickness Measurement System

Wavelength Range: 180-500nm Grating: 1200line/mm Resolution (FWHM) [MIN FWHM]: 0.2nm (MIN FWHM)

Plastic-film thickness optical system: UV xenon lamp, UV spectrometer and probe. White-light interference uses d = (wave2 - wave1)/deltaWave * K, where wave is wavelength, deltaWave the two-peak separation and K the refractive coefficient. Typical range is 0.5um -100um: approximately 200nm UV for 0.5um films, 500-600nm visible for 10-50um, and 800nm IR for around 80um. Above 100um, vernier calipers are recommended. Transparent films use transmission; opaque films, such as semiconductor etch endpoints, use reflection. A CMOS UV spectrometer and xenon source provide a cost-effective solution, with a JPN detector and USA/Germany hardware. 1. Integrated CMOS/xenon UV system simplifies measurement. 2. A high-performance flashing xenon lamp gives stable UV measurements. 3. Low-cost integration reduces complexity and provides a complete solution.

Standard Light Source Wavelength: 633nm（632.8nm） Phase Retardation Measurement Interval: 0°~180° Measurement Repeatability: 0.2°

The LP1000 phase-retardation meter has received a second-class national invention award, and the company participated in drafting the national standard. Traceability, high precision, temperature compensation and multiwavelength conversion support stress and phase testing of waveplates, crystals and other optics. The core P1000 technology received the second-class National Technological Invention Award. We helped draft GB/T 26827-2011, Calibration Method for Waveplate Phase Retardation Measurement Devices. LP1000 is Leice's main traceable birefringence measurement model, intended for precision calibration of internal stress and phase retardation in optical elements. It tests transmissive materials such as waveplates, optical glass, display panels and crystals. A precision translation stage and temperature-compensation module are included, with customized nonstandard scanning solutions available.

Correction Capability [Single mirror, X,Y directions; correction range increases with multiple mirrors.]: Single mirror X,Y directions ± 0.4 mrad (correction range increases with multiple mirrors). Minimum Stride: ≤0.1μrad Direction LockingAccuracy [(@RMSE, Focal Point)]: ≤1urad (@RMSE, Focal Point)

In precision optics, thermal drift and stress relaxation can cause low-frequency beam disturbances and sustained spot drift. A highly sensitive camera detects disturbances in real time, while intelligent control dynamically steers an electrically controlled mirror to maintain a preset direction. Unlike other pointing-lock systems, camera detection with small pixels improves locking accuracy. During locking, users can observe spot shape and monitor beam power and its changes in real time.

Specifications [±0.25]: 75*25*1.0mm（±0.25） Material: Quartz SiO₂, Chromium Coating Weight: 4.9g

Placing different masks, slits and apertures in the optical path at the Fourier plane before the beamsplitter allows pattern changes to be observed on the viewing screen.

Donglai Technology's laser linewidth test system uses delayed self-heterodyne interferometry, with an AOM as the interferometer's frequency shifter. The system includes a high-gain optical receiver/photodetector, a low-noise RF amplifier (LNA) and a high-resolution optical spectrum analyzer for measurement. High sensitivity permits measurement and analysis of laser linewidths down to 2kHz.