Fully Automated Film Thickness Measurement System — Starting at RMB 20000 VIS3-200-800
Shanghai Jiepu Technology's fully automatic film-thickness instrument can use a two-axis stage with X120mm and Y120mm travel. Its imported xenon lamp covers 200-2500nm, operates continuously for 5 years and provides stability >99.99%. Nondestructive, fast, highly accurate measurement serves films and other industries. Broadband light passes through fiber and a sensing head to the target. One portion reflects at the surface; transmitted light reflects from the back and returns. The 2 reflections interfere at each wavelength, with intensity determined by reference-to-target distance and maximized at integer wavelength multiples. Spectral splitting and a CCD provide the intensity spectrum. FFT and other waveform analysis determine distance. In a thin-film example, 200-800nm xenon excitation measures 1.96um thickness.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Wavelength Range | 200-800nm |
| Applicable Applications | Film Thickness Measurement |
| Recommended Light Source | Pulsed Xenon Lamp or Deuterium-Halogen Lamp |
| Wavelength Resolution | 2048 channels, 0.3nm spacing (minimum) |
| Detector | CMOS linear array, 2048 pixels, linearity >99.8% |
| Motion Stage | X 120mm,Y 120mm or X1000mm Y1000mm |
| Motion Stage Accuracy | All-Steel Motion Platform, X-Y Accuracy 2um, Positioning Repeatability 5um |
| Continuous Operating Time | Continuous 7*24-hour operation |
| Mapping Imaging | Supports hyperspectral mapping imaging |
| Image File | Imaging files of approximately 200M are stored on disk without occupying memory; continuous 7*24-hour operation |
| Illumination Reception | Reflection 90 degrees |
| Spot size | 1-3mm adjustable |
| Measurement Range | Reflectance 0-100% |
| Single Acquisition Time | 0.01 seconds per point; 3000 points over 100mm*100mm in only 4 minutes |
| Wavelength Accuracy | <0.5nm |
| Wavelength Repeatability | 0.1nm |
| Film Thickness Measurement Error | 0.5% |
| Instrument Repeatability | >99.9% |
| Measurement Parameters | Wavelength-dependent reflectance, average reflectance, reflectance spectrum, reflectance versus time, XY,XYZ,LAB,HSV, UVA, UVB, UVC |
| Circuit | Built-in xenon lamp control circuit |
| Connectors and Data | 30PIN connector, including USB (480Mbps)/TTL (3.3v)/RS232/485 |
| Dimensions | 300 mm × 185 mm × 104 mm |
Key Features
Datasheet
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Supplier Information
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