ARHT high-speed rotary stage (ARHT-300)
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Specifications
| Parameter | Value |
|---|---|
| Table Diameter | 300 mm |
| Maximum Load | 5 kg |
| Rotational Speed | 6000 rpm |
| Acceleration | 1000 rpm/s |
| Positioning Accuracy | ±2 arc sec |
| Repeatability | ±1 arc sec |
| Homing Repeatability | ±1 arc sec |
| Axial Synchronous Error | 200 nm |
| Radial Synchronous Error | 200 nm |
| Static Stability | 0.5 arc sec |
| Minimum step | 0.5 arc sec |
| Resolution | 0.019 arc sec |
| Velocity Uniformity | 0.01 % |
| Following Error | ±0.005 ° |
| Weight | 60 kg |
| Central Vacuum Level | >80 kPa |
| Air Consumption | 80 L/min |
| Air Supply Pressure | 0.5-0.6MPa |
| Failure-free Operating Time | 20000h |
| Supply Voltage | 380VAC |
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