1064nm dielectric galvo scanner
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Specifications
| Parameter | Value |
|---|---|
| Surface Finish | Better than20/10 |
| Parallelism | Better than1″ |
| Process ranges and technology indicator exterior ranges | φ100mm-φ630mm |
| Material | Silicon carbide Crystal Sapphire Melting StoneKrF/ArFLevel K9 |
| Process ranges and technological indicator membrane systems | Incremental、Strengthening aluminium/Silver/Kim/Medium High Reverse（I'm good at the back of the film） |
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Datasheet
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