Specifications
| Parameter | Value |
|---|---|
| Net Weight | 2400 kg |
| Wafer Loading Specification | 8-inch cassette; 12-inch standard FOUP |
| Minimum Wafer Defect Size | 1.5 μm |
| Minimum Packaged Device/PCB Defect Size | 15 μm |
| Ranging Accuracy | 5 μm |
| Height Measurement Accuracy | 5 μm |
| Wafer Throughput | 60 wafers/hour (8-inch wafer) |
| PCB Throughput | 1100 or 2100 components/hour, depending on component size |
| ESD Class | Class 1 |
| Power Requirement | 220 V, 50 Hz, 20 A |
| Air Supply Requirement | 0.5–0.7 MPa, φ8 mm inlet tube |
| Working temperature | 20–26 °C |
Datasheet
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Supplier Information
Tianjin Huahui Core Technology Group Co., Ltd. (hereinafter referred to as "Huahui Core Technology Group") was established in November 2017. It is a professional micro-nano optoelectronic chip manufacturing service provider, a national high-tech enterprise, one of the first batch of gazelle enterprises in Tianjin, a "specialized, refined, distinctive and innovative" small and medium-sized enterprise, and a leading enterprise in strategic emerging industries. The company's main business is professional micro-nano optoelectronic chip manufacturing services, including the design, research and development, and production of optoelectronic chips such as lasers, modulators, and metastructures. It has completed 5 rounds of financing (investors include Haihe New Ecology, Xinneng Sheng'an, China Merchants Venture Capital, Shenzhen Capital Group, Northern Light, Beijing-Tianjin-Hebei National Technology Innovation Center and other leading institutions), with cumulative financing of hundreds of millions of yuan.
The achievement "Key Fabrication Processes and Applications of Micro-nano Structure Optoelectronic Chips", with Huahui Core Technology Group as the main completion unit, passed the scientific and technological achievement appraisal meeting organized by the Chinese Institute of Electronics in July 2022, and won the 2022 Tianjin Technical Invention Special Prize. The appraisal committee composed of 12 peer experts including 7 academicians highly praised the achievement, believing that the achievement is highly innovative and at the international advanced level as a whole; it has reached the international leading level in deep etching photonic crystal fabrication technology, nanometer-level flatness metal thin film fabrication technology, and super-large aspect ratio cantilever beam photoacoustic crystal fabrication technology; it has effectively promoted China's innovative research and industrial development in the field of new optoelectronic chips, and produced significant economic and social benefits.
Huahui Core Technology Group has an innovation and entrepreneurship engineering master's training base and a national-level postdoctoral research workstation, jointly training nearly 20 engineering masters, and several postdoctoral fellows have completed their studies; it has 49 authorized patents and has published several high-level papers. At the same time, the group company leads the national key research and development plan "Disruptive Technology Innovation" project, and a number of provincial, ministerial, municipal and district-level scientific research projects; the "High-end Optoelectronic Chip Pilot Test Platform" project won the first prize in the first National Postdoctoral Innovation and Entrepreneurship Competition, the silver prize in the second National Postdoctoral Innovation and Entrepreneurship Competition, and the first prize in the Tianjin "Haihe Talent" Innovation and Entrepreneurship Competition.
Huahui Core Technology Group has been approved to prepare for the establishment of the Tianjin Key Laboratory of Micro-nano Optoelectronic Technology, and jointly established the "Micro-nano Optoelectronic Technology Laboratory" with the Beijing-Tianjin-Hebei National Technology Innovation Center. It is a provincial and ministerial-level optoelectronic chip pilot test platform supported by the Tianjin Science and Technology Bureau. At present, it has a high-level technical team of more than 100 people, an 8000㎡ ultra-clean laboratory, and an 18000㎡ industrialization base. The company has passed ISO 9001 quality management system certification (GB/T 19001-2016/ISO 9001:2015), and has the process capability of micro-nano structure optoelectronic chips across material systems such as imprint templates, nano-waveguides, and metasurfaces; with micro-nano structure optoelectronic chips and high-end laser chips as the core products, they are widely used in optical communications, autonomous driving, augmented reality, intelligent sensing and other fields, with cumulative customers reaching more than 500.
Huahui Core Technology Group is a member of Tianjin Integrated Circuit Industry Association, Tianjin Semiconductor Integrated Circuit Talent Innovation and Entrepreneurship Alliance, and Tianjin New Generation Artificial Intelligence Industry (Talent) Alliance.
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