White Light Interferometer AM-8000 Series
While achieving high-precision measurement, the AM-8000 series also offers more efficient intelligent control: one-key automatic workpiece finding, focusing and leveling, with an XY-axis measurement range up to 300×300mm, meeting Mapping multi-point measurement, aspheric K-value measurement and other needs.; Compared with the AM-7000 series, the AM-8000 series platform has a 3x larger travel, 2.5x higher load capacity, 50% better positioning accuracy and 30% faster moving/stitching speed, supports more interferometric objectives and covers a wider range of application scenarios. Widely used in semiconductors, precision optics, 3C, new energy and other fields, providing efficient solutions for micro-nano structure measurement and roughness inspection.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Accuracy | 0.03nm |
| XY Axis Measurement Range | Up to 300×300 mm |
| Stage Travel | 3 times improvement over the AM-7000 series |
| Load Capacity | 2.5 times improvement over the AM-7000 series |
| Positioning Accuracy | 50% improvement over the AM-7000 series |
| Travel Stitching Speed | 30% improvement over the AM-7000 series |
Applications
Datasheet
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Supplier Information
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