Universal Laser Plane Interferometer
1. Excellent hardware performance: inherits outstanding vibration resistance, extremely high fringe locking accuracy and excellent field clarity, ensuring a stable and reliable measurement foundation. 2. Strong environmental adaptability: environmental adaptability in production environments is superior to similar products on the market, ensuring measurement consistency under complex working conditions. 3. Efficient large-capacity design: the spacious working chamber facilitates large-size mirror surface or batch inspection, improving inspection efficiency. 4. Intelligent digital analysis: (core upgrade) equipped with an advanced software analysis system.
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Overview
Specifications
| Parameter | Value |
|---|---|
| First Reference Plane (Face A) | Diameter D1=Φ146 mm, flat surface figure error (PV) less than 0.03 um (λ/20) |
| Second Reference Plane (Face B) | Diameter D2=Φ140 mm, flat surface figure error (PV) less than 0.03 um (λ/20) |
| Collimation System | Working diameter Φ146mm; focal length f=400mm |
| Light Source Specification | Laser ZN260 (He-Ne) |
| Digital Analysis System | Mechanical phase-shifting PSI-Zphasestation |
| Interference Chamber Dimensions | Φ 300x180mm |
Applications
Datasheet
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Supplier Information
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