Practical Laser Plane Interferometer
While retaining the original uses and features of the XQ15-G I laser plane interferometer, further improve its practicality and range of application.
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Overview
Specifications
| Parameter | Value |
|---|---|
| First Reference Plane (Face A) | Diameter D1=Φ146 mm, flat surface figure error (PV) less than 0.03 μm (λ/20) |
| Second Reference Plane (Face B) | Working diameter D=Φ140mm, flat surface figure deviation less than 0.03μm (λ/20) |
| Collimation System | Working diameter Φ146mm; focal length f=400mm |
| Light Source Specification | Laser ZN260 (He-Ne) |
| Maximum Applicable Size | Φ500x250mm |
Applications
Key Features
Datasheet
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Supplier Information
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