Large-Aperture Horizontal Laser Plane Interferometer
This model uses a horizontal interferometric testing solution, effectively solving the difficult problem of final testing of large-aperture high-precision flats. The single-channel design not only significantly reduces manufacturing costs but also maximizes equipment performance.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Clear Aperture Dimension | 600mm |
| Main Structure | Fizeau interference principle |
| Light Source Mode | Frequency-stabilized He-Ne laser (tunable laser optional) |
| Camera Effective Pixels | Better than 1280x1024, higher pixel count optional (polarization dynamic camera and corresponding optomechanical configuration optional) |
| Optical Center Height | 415mm |
| Reference Surface Specifications | Fused silica PV: better than λ/10 |
| Pv Repeatability | <0.01λ |
| RMS Repeatability | <0.002λ |
| Recommended Air Bearing Platform Dimensions | 6.0*2.0 m |
Applications
Datasheet
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Supplier Information
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