250mm Vertical Laser Plane Interferometer
Inherits and carries forward the practicality and durability advantages of the XQ15-GIII laser plane interferometer
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Overview
Specifications
| Parameter | Value |
|---|---|
| First Reference Plane (Face A) | Working diameter D=Φ250mm, flat surface figure deviation less than 0.045μm (λ/15) |
| Second Reference Plane (Face B) | Working diameter D=Φ250mm, flat surface figure deviation less than 0.045μm (λ/15) |
| Collimation System | Working diameter Φ250mm; focal length f = 590mm; wavefront aberration <λ/10 |
| Chamber Dimensions | 550×400×300mm |
| Light Source Specification | Laser ZN250 (He-Ne) (632.8 nm) |
| Instrument Overall Dimensions | 590×450×1150mm(H) |
| Instrument Mass | 200kg |
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Datasheet
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Supplier Information
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