Economy Direct Drive Stage
The ECO190LM series direct drive stage is the latest generation of sub-micron direct drive stages refined through continuous optimization, offering high accuracy, excellent mechanical repeatability and a side-sealing structure, achieving nanometer-level minimum incremental motion and sub-micron bi-directional repeatability at low cost. The ECO190LM delivers better geometric accuracy than competing products, with bi-directional repeatability better than 0.75 μm and positioning accuracy of <1 μm after linear error compensation. The ECO190LM direct drive stage uses a specially customized linear motor as the drive element, which features extremely low cogging and normal attractive force, high thrust and smooth motion, combining sub-micron positioning capability with outstanding high dynamic response. The stage uses a long-life precision linear guideway bearing system combined with a specially designed linear-friction side-sealing structure, which effectively prevents process debris, dust and obvious particles from entering the stage, improving product service life; an optional positive-pressure air purge system is available. The product is available in five models with design travels from 200 mm to 600 mm, speeds up to 1500 mm/s, and a complete single-axis/multi-axis cable management solution.
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