Linear Positioning Stage > Nanopositioning Stage

The REI95VC is a standardized, modular voice coil nanopositioning stage with a maximum travel of 15 mm and positioning accuracy better than 100 nm. The high-rigidity sliding-friction bearing system achieves the perfect combination of speed, accuracy, resolution, bi-directional repeatability, size and reliability. It offers acceleration up to 4 g, speeds of 400 mm/s and millisecond-level fast settling performance. Extremely high system resolution is the foundation of outstanding accuracy, bi-directional repeatability and position stability; the stage achieves minimum incremental motion of better than 2 nm in voice coil motor applications, and is completely backlash-free with near-zero system hysteresis, enabling precise and highly repeatable nanometer-level motion. The high-performance voice coil motor non-contact drive features fast response, high dynamic performance, zero cogging, sub-nanometer resolution, extremely low velocity ripple, high speed and high accuracy. The unique structural design and compact size allow high performance even in tight installation spaces. It features a standardized universal mounting pattern for easy system integration; XY, XYZ or more-axis applications can be flexibly assembled and configured using standard mounting holes.

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