REI95LM Nanopositioning Stage
The REI series nanopositioning stages are standardized, modular nanopositioning stages. The REI95LM offers a travel of more than 100 mm and positioning accuracy up to better than 100 nm, using a high-rigidity sliding-friction bearing system to combine speed, accuracy, resolution, bi-directional repeatability, size and reliability. Featuring non-contact direct drive technology with high dynamic performance, zero cogging, sub-nanometer resolution and extremely low velocity ripple, it is completely backlash-free with near-zero system hysteresis, enabling precise and highly repeatable nanometer-level motion. It features a standardized universal mounting pattern; XY, XYZ or more-axis applications can be flexibly assembled and configured using standard mounting holes.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Travel | >100 mm |
| Positioning Accuracy | ≤100 nm |
| Repeatability | ≤75 nm |
| Control Resolution | <0.3 nm |
| Position Stability (Steady-state Error) | <2 nm |
| Max. Acceleration | 5 g |
| Max. Velocity | 500 mm/s |
| Minimum Incremental Motion | <1 nm |
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