The REI series nanopositioning stages are standardized, modular nanopositioning stages. The REI95LM offers a travel of more than 100 mm and positioning accuracy up to better than 100 nm, using a high-rigidity sliding-friction bearing system to combine speed, accuracy, resolution, bi-directional repeatability, size and reliability. Featuring non-contact direct drive technology with high dynamic performance, zero cogging, sub-nanometer resolution and extremely low velocity ripple, it is completely backlash-free with near-zero system hysteresis, enabling precise and highly repeatable nanometer-level motion. It features a standardized universal mounting pattern; XY, XYZ or more-axis applications can be flexibly assembled and configured using standard mounting holes.
| Parameter | Value |
| Travel | >100 mm |
| Positioning Accuracy | ≤100 nm |
| Repeatability | ≤75 nm |
| Control Resolution | <0.3 nm |
| Position Stability (Steady-state Error) | <2 nm |
| Max. Acceleration | 5 g |
| Max. Velocity | 500 mm/s |
| Minimum Incremental Motion | <1 nm |
Applications requiring smooth, fast positioning and precise motion, such as fiber coupling manufacturing, sensor testing and scanning, and microscopy.
Outstanding nanopositioning performance throughout the full travel; high-rigidity sliding-friction bearing system with outstanding dynamic response; non-contact direct drive with zero cogging and extremely low velocity ripple; completely backlash-free with near-zero system hysteresis; standardized, modular design with universal mounting pattern for flexible XY/XYZ multi-axis combinations.
Sichuan CNBHC Technology Co., Ltd. (CNBHC) has long been dedicated to providing ultra-precision motion control core subsystems for fields such as ultra-precision machine tools, free-form surface mask direct writing, lithography direct writing, wafer dicing, wafer defect inspection, ultrafast wafer microscopic imaging, micro-nano manufacturing, high-precision packaging and testing, and metrology and inspection.
With extreme performance that distinguishes it from competitors, CNBHC continues to provide core components and system solutions for the advanced equipment industry.
CNBHC always adheres to international general testing standards such as GB17421, ISO230-2, and VDI3441, striving to provide customers with continuous, stable, and high-quality products and services.
CNBHC always upholds the responsibility of "pursuing excellent quality and creating a national brand", insists on basic research, inherits the spirit of craftsmanship, and forges ahead for the honor of Made in China.