Z-Axis Nanopositioning Stage
The REI130ZS and REI130ZS-Plus dual-counterbalanced Z-axis nanopositioning stages are the best combination of speed, accuracy, system resolution, bi-directional repeatability, reliability and compact size. As derivatives of the REI series, they deliver the same motion performance as the REI130LM series and are the best Z-axis choice for space-constrained applications. Using a nearly frictionless balancing mechanism with counterbalance capacity user-adjustable from 0 to 14 kg, and featuring non-contact direct drive technology with high dynamic performance, zero cogging, sub-nanometer resolution, extremely low velocity ripple, high speed and high accuracy, the stages are completely backlash-free with near-zero system hysteresis, enabling precise, highly repeatable nanometer-level motion as well as extremely low-speed smooth motion (<10 nm/s).
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Overview
Specifications
| Parameter | Value |
|---|---|
| Min. Incremental Motion | EC: 10nm; Base: 3nm; Plus: 2nm |
| Straightness | <1.5um |
| Flatness | <2.5um |
| Roll | 8 arc secarc sec |
| Yaw | 5 arc secarc sec |
| Maximum Speed | 200 mm/s |
| Maximum Force (Continuous) | 23.5 N |
| Traceability For Calibration | ISO230-2 or GB17421 |
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