The REI130XY features an integrated one-piece, low-profile design with a travel of more than 160×160 mm and a total stage height of only 90 mm. It uses a sliding-friction bearing system and is derived from the REI130LM single-axis product. It features complete hard-limit and soft-limit protection, an integrated cable management system and three different accuracy grades. Ultra-high spatial geometric accuracy: key indicators such as orthogonality error, straightness and flatness can be optimized to achieve user-specified tolerance ranges; the product is backlash-free with near-zero system hysteresis, ensuring precise positioning and highly repeatable nanometer-level motion throughout the entire 2-D motion range. Ultra-high accuracy grade options: after dynamic trajectory inspection and dynamic calibration with the system control software, 2-D motion accuracy of ±150 nm or better can be guaranteed; the performance difference between the standard and ultra-high precision versions is mainly reflected in orthogonality error. Non-contact direct drive: featuring high dynamic performance, zero cogging, sub-nanometer resolution, extremely low velocity ripple, high speed and high accuracy, the unique structural design and compact size allow high performance even in tight installation spaces. Multi-axis applications: can be quickly combined with other stage products to build high-performance multi-axis systems.
Applications requiring smooth, fast positioning and precise motion, such as fiber coupling manufacturing, sensor testing and scanning, and microscopy; can be combined with Z-axis lift stages (REI95LM-Z), precision rotary tables, angular stages (goniometers), etc. to form multi-axis systems
Integrated one-piece, low-profile XY nanopositioning stage with travel up to 160×160 mm and a total height of only 90 mm; control resolution <0.3 nm, bi-directional repeatability up to ≤75 nm; positioning capability better than 1 nm; fast settling time, reaching ±5 nm steady-state error within 25 ms; high-rigidity sliding-friction bearing system with excellent spatial geometric accuracy; non-contact direct drive with zero cogging, sub-nanometer resolution and extremely low velocity ripple; backlash-free with near-zero system hysteresis; complete hard-limit and soft-limit protection with an integrated cable management system; available in three different accuracy grades
Sichuan CNBHC Technology Co., Ltd. (CNBHC) has long been dedicated to providing ultra-precision motion control core subsystems for fields such as ultra-precision machine tools, free-form surface mask direct writing, lithography direct writing, wafer dicing, wafer defect inspection, ultrafast wafer microscopic imaging, micro-nano manufacturing, high-precision packaging and testing, and metrology and inspection.
With extreme performance that distinguishes it from competitors, CNBHC continues to provide core components and system solutions for the advanced equipment industry.
CNBHC always adheres to international general testing standards such as GB17421, ISO230-2, and VDI3441, striving to provide customers with continuous, stable, and high-quality products and services.
CNBHC always upholds the responsibility of "pursuing excellent quality and creating a national brand", insists on basic research, inherits the spirit of craftsmanship, and forges ahead for the honor of Made in China.