Integrated XY Nanopositioning Stage
The REI130XY features an integrated one-piece, low-profile design with a travel of more than 160×160 mm and a total stage height of only 90 mm. It uses a sliding-friction bearing system and is derived from the REI130LM single-axis product. It features complete hard-limit and soft-limit protection, an integrated cable management system and three different accuracy grades. Ultra-high spatial geometric accuracy: key indicators such as orthogonality error, straightness and flatness can be optimized to achieve user-specified tolerance ranges; the product is backlash-free with near-zero system hysteresis, ensuring precise positioning and highly repeatable nanometer-level motion throughout the entire 2-D motion range. Ultra-high accuracy grade options: after dynamic trajectory inspection and dynamic calibration with the system control software, 2-D motion accuracy of ±150 nm or better can be guaranteed; the performance difference between the standard and ultra-high precision versions is mainly reflected in orthogonality error. Non-contact direct drive: featuring high dynamic performance, zero cogging, sub-nanometer resolution, extremely low velocity ripple, high speed and high accuracy, the unique structural design and compact size allow high performance even in tight installation spaces. Multi-axis applications: can be quickly combined with other stage products to build high-performance multi-axis systems.
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