Quartz Crystal Microbalance (QCM) Sensor Crystal
The product is a circular quartz crystal microbalance (QCM) sensor crystal used as the sensing element in thin film deposition monitoring systems. One face of the disk carries a patterned metal electrode with an outer ring segment, central circular electrode and top/bottom contact tabs, while the opposite face is blank and unpatterned. Made from an AT-cut quartz blank, the crystal oscillates at its resonant frequency inside a vacuum coating chamber; as coating material accumulates on the electrode, the added mass lowers the frequency in proportion to the deposited mass (Sauerbrey relationship), allowing a connected deposition monitor or controller to calculate deposition rate and film thickness in real time. It is a standard, low-cost consumable for optical coating, semiconductor, OLED and general PVD processes.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Crystal Material | AT-cut quartz |
| Fundamental Frequency | 6MHz |
| Diameter | 14mm (0.55in) |
| Electrode Material | Au |
| Front Electrode | Patterned electrode with central pad and top/bottom contact tabs |
| Back Electrode | Blank (unpatterned) |
| Surface Finish | Polished |
| Operating Temperature | ≤90°C |
| Mass Sensitivity | ≈81.5Hz·cm²/μg |
| Compatible Equipment | QCM deposition monitors/controllers |
Applications
Key Features
Datasheet
Supplier Information
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