Quartz Crystal Microbalance (QCM) Sensor Crystal

Quartz Crystal Microbalance (QCM) Sensor Crystal

Supplier
Jjk
Part Number
Quartz Crystal Microbalance (QCM) Sensor Crystal
Category
Crystallography
Origin
China

The product is a round AT-cut quartz crystal microbalance (QCM) sensor wafer used as a consumable sensing element in thin film deposition monitoring systems. As shown in the image, the front side of the wafer carries a patterned metal electrode in a keyhole/anchor shape (a circular pad with a connecting tab), while the back side is a blank full-face electrode. When mounted in a standard crystal holder inside a vacuum chamber, the quartz wafer oscillates at its resonant frequency; as coating material deposits on the electrode surface, the added mass lowers the oscillation frequency, and a deposition controller converts this frequency shift into film thickness and deposition rate. It is a standard replacement part for optical coating, semiconductor, and display manufacturing processes.

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Overview

The product is a round AT-cut quartz crystal microbalance (QCM) sensor wafer used as a consumable sensing element in thin film deposition monitoring systems. As shown in the image, the front side of the wafer carries a patterned metal electrode in a keyhole/anchor shape (a circular pad with a connecting tab), while the back side is a blank full-face electrode. When mounted in a standard crystal holder inside a vacuum chamber, the quartz wafer oscillates at its resonant frequency; as coating material deposits on the electrode surface, the added mass lowers the oscillation frequency, and a deposition controller converts this frequency shift into film thickness and deposition rate. It is a standard replacement part for optical coating, semiconductor, and display manufacturing processes.

Specifications

ParameterValue
Nominal Frequency6MHz
Crystal CutAT-cut
Wafer ShapeRound
Crystal Diameter14mm(0.55in)
Substrate MaterialQuartz
Electrode MaterialAu/Ag
Front Electrode PatternKeyhole/anchor-shaped pad with connecting tab
Back ElectrodeFull-face electrode
Electrode AppearanceSilver-gray metallic coating
Operating Temperature≤80°C

Applications

1. In-situ film thickness and deposition rate monitoring in optical coating systems (AR/HR coatings, filters, mirrors). 2. Process control in vacuum evaporation and magnetron sputtering equipment. 3. Semiconductor metallization and PVD/CVD deposition monitoring. 4. OLED, flat panel display, and photovoltaic thin film manufacturing. 5. Surface science research and laboratory thin film analysis.

Key Features

1. AT-cut quartz wafer delivers stable resonant frequency and accurate, repeatable thickness/rate measurement. 2. Keyhole/anchor-shaped front electrode with connecting tab ensures reliable electrical contact and uniform mass sensitivity. 3. Full-face back electrode simplifies installation in standard crystal holders. 4. Gold or silver electrode options provide good film adhesion and corrosion resistance. 5. Standard 14mm round wafer, compatible with mainstream thin film deposition controllers and sensor heads. 6. Low-cost, easy-to-replace consumable for continuous vacuum coating production.

Datasheet

Product Datasheet
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Supplier Information

<p>Jiaxing Jingkong Electronics Co., Ltd. is located at No. 480, Jiangxian Road, Yuxin Town, Jiaxing City, Zhejiang Province, with a factory area of 11,000 square meters and 70 employees. It is a small technology enterprise focusing on the R&D, production and sales of quartz crystal oscillator sensors. JJK attaches great importance to accumulation, especially in the piezoelectric quartz crystal industry with over 30 years of practical experience. The company prioritizes employee stability in management and has built a highly stable operating team. By the end of 2022, JJK's direct user base had exceeded 800. JJK's unremitting goal is to provide customers with the most reliable crystal oscillator slices. The manufacturing process pursues high reliability even if it means technological overkill, without compromising reliability to reduce costs. To further meet customer needs, JJK continuously develops related new products, offering various cost-effective coating materials and crystal control accessories.</p>

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