Turbo Molecular Pump
The Turbo Molecular Pump by Osaka Vacuum is a high-performance vacuum pump designed for advanced vacuum applications, offering exceptional reliability and efficiency.
Specification Snapshot
Inlet Flange Size
ISO-K, ISO-F, CF
Power Supply Voltage (V)
200-240
Power Consumption (W)
500-1500
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Overview
The Turbo Molecular Pump by Osaka Vacuum is a high-performance vacuum pump designed for advanced vacuum applications, offering exceptional reliability and efficiency.
Specifications
| Parameter | Value |
|---|---|
| Rotation Speed (rpm) | Up to 90,000 |
| Pumping Speed (L/s) | 300-3000 |
| Ultimate Vacuum (Pa) | <1x10^-7 |
| Inlet Flange Size | ISO-K, ISO-F, CF |
| Operating Temperature (°C) | 5-40 |
| Power Supply Voltage (V) | 200-240 |
| Power Consumption (W) | 500-1500 |
| Weight (kg) | 15-50 |
Applications
1. Semiconductor manufacturing 2. Surface analysis 3. Thin film deposition 4. Research and development
Key Features
1. High-speed rotation for efficient vacuum generation 2. Compact and lightweight design 3. Low vibration and noise levels 4. High reliability and long operational life
Datasheet
Product Datasheet
PDF
Supplier Information
<p>Osaka Vacuum, Ltd. is a Japanese vacuum pump manufacturer founded in 1950. For over 75 years, the company has specialized in design, manufacturing, sales, and maintenance of vacuum pumps and systems. Its extensive product lineup includes magnetically levitated and ball-bearing turbo molecular pumps, dry vacuum pumps, roots pumps, oil-sealed rotary pumps, and vacuum systems, serving semiconductor, electronics, medical, aerospace, optical, and chemical industries worldwide.</p>
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