Trigon™ BAG552 SingleGauge

Trigon™ BAG552 SingleGauge

Supplier
Inficon
Part Number
Trigon™ BAG552 SingleGauge
Category
Other
Origin
China

The Trigon™ BAG552 SingleGauge is a Bayard-Alpert hot ion gauge designed for precise vacuum measurement of gases in the pressure range of 5×10⁻¹⁰ to 2×10⁻² mbar. It features dual filaments for enhanced accuracy, repeatability, and longevity, along with a removable calibration data chip for seamless operation.

Specification Snapshot
Output Signal
0 to +10V
Current Consumption-Standard
≤0.5A
Current Consumption-Degas
≤0.9A
Current Consumption-Emission Start
≤1.4A
Power Consumption
≤18W (standard), ≤21W (EtherCAT)
Cable Length-Analog and Fieldbus Operation
≤35m (0.25mm²/conductor), ≤50m (0.34mm²/conductor), ≤100m (1.0mm²/conductor)
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Overview

The Trigon™ BAG552 SingleGauge is a Bayard-Alpert hot ion gauge designed for precise vacuum measurement of gases in the pressure range of 5×10⁻¹⁰ to 2×10⁻² mbar. It features dual filaments for enhanced accuracy, repeatability, and longevity, along with a removable calibration data chip for seamless operation.

Specifications

ParameterValue
Measurement Range5×10⁻¹⁰ to 2×10⁻² mbar
Accuracy±15% of reading
Repeatability5% of reading, 10⁻⁸ to 2×10⁻² mbar (after 10 min. stabilization)
Switching Threshold-On2.4×10⁻² mbar
Switching Threshold-Off3.2×10⁻² mbar
Emission Current-Sliding Mode5mA (p≤8×10⁻⁷ mbar), 25μA (p>1×10⁻³ mbar)
Emission Current-Two-Point Mode5mA (p≤7.2×10⁻⁶ mbar), 25μA (3×10⁻⁵ mbar<p<3.2×10⁻² mbar)
Degas Emission Current≈16mA (Pdegas≈4W)
Control Input Signal0V/+24V (dc), active high
Degas Duration≤3min, followed by automatic stop
Output Signal0 to +10V
Measuring Range+0.57 to +8.176V (5×10⁻¹⁰ to 2×10⁻² mbar)
Relationship Voltage-Pressure1V/decade, logarithmic
Error Signal+0.1V (EEPROM error), +0.3V (BA sensor error)
Minimum Load Impedance10kΩ
Supply Voltage+24V (dc) (+20 to +28V)
Ripple≤2Vp-p
Current Consumption-Standard≤0.5A
Current Consumption-Degas≤0.9A
Current Consumption-Emission Start≤1.4A
Power Consumption≤18W (standard), ≤21W (EtherCAT)
Fuse1.25AT
Sensor Cable ConnectionD-sub 15-pin, male
Measuring CableShielded, max. 15-pin plus shielding
Cable Length-Analog and Fieldbus Operation≤35m (0.25mm²/conductor), ≤50m (0.34mm²/conductor), ≤100m (1.0mm²/conductor)
Cable Length-RS232C Operation≤30m
Switching Functions-SetpointsSP1, SP2
Adjustment Range5×10⁻¹⁰ to 2×10⁻² mbar
Relay Contact Rating≤60V (dc)/0.5A (dc), resistive
Admissible Temperature-Storage-2 to +70°C
Admissible Temperature-Operation0 to +50°C
Bakeout Temperature+150°C (at vacuum connection, horizontally mounted)
Relative Humidity≤65%/85% (no condensation)
Interface-DigitalDiagnostic port connection, RS232C, Jack connector
Materials Exposed to VacuumStainless steel, NiFe, nickel plated, Hastelloy, glass, iridium, yttrium oxide (Y₂O₃)
Internal Volume-DN25 ISO-KF≈24cm³
Internal Volume-DN40 CF-R≈34cm³
Weight550 to 760g
Pressure Max.5bar (absolute)
Mounting OrientationAny
Degree of Pollution2
Degree of ProtectionIP40
RS232C Data Rate9600 Baud
RS232C Data FormatBinary, 8 data bits, one stop bit, no parity bit, no handshake
EtherCAT ProtocolEtherCAT
EtherCAT Communication StandardsETG.5003 Part 1 Common Device Profile, ETG.5003 Part 2080 Specific Device Profile - Vacuum Pressure Gauge
EtherCAT Process DataFixed PDO mapping and configurable PDO mapping
EtherCAT ConnectorRJ45, 8-pin (socket), IN and OUT
EtherCAT CableShielded Ethernet CAT5e or higher
EtherCAT Cable Length≤100m (330ft)
EtherCAT Data Rate100000Kbps

Applications

1. Ultra-high vacuum (UHV) measurement 2. High vacuum (HV) measurement 3. Semiconductor manufacturing 4. Research laboratories

Key Features

1. Pure Bayard-Alpert measuring system for wide UHV & HV range 2. Dual filaments for enhanced accuracy 3. Galvanic isolated electronics to avoid stray current 4. Sliding emission mode to prevent pressure jumps 5. Extended bakeability with removable calibration chips 6. Bright OLED display with user interface 7. Analog output, RS232C, EtherCAT compatibility 8. RoHS compliance

Datasheet

Product Datasheet
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Supplier Information

In
Inficon
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<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>

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