Trigon™ BAG552 SingleGauge
The Trigon™ BAG552 SingleGauge is a Bayard-Alpert hot ion gauge designed for precise vacuum measurement of gases in the pressure range of 5×10⁻¹⁰ to 2×10⁻² mbar. It features dual filaments for enhanced accuracy, repeatability, and longevity, along with a removable calibration data chip for seamless operation.
Specification Snapshot
Output Signal
0 to +10V
Current Consumption-Standard
≤0.5A
Current Consumption-Degas
≤0.9A
Current Consumption-Emission Start
≤1.4A
Power Consumption
≤18W (standard), ≤21W (EtherCAT)
Cable Length-Analog and Fieldbus Operation
≤35m (0.25mm²/conductor), ≤50m (0.34mm²/conductor), ≤100m (1.0mm²/conductor)
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Overview
The Trigon™ BAG552 SingleGauge is a Bayard-Alpert hot ion gauge designed for precise vacuum measurement of gases in the pressure range of 5×10⁻¹⁰ to 2×10⁻² mbar. It features dual filaments for enhanced accuracy, repeatability, and longevity, along with a removable calibration data chip for seamless operation.
Specifications
| Parameter | Value |
|---|---|
| Measurement Range | 5×10⁻¹⁰ to 2×10⁻² mbar |
| Accuracy | ±15% of reading |
| Repeatability | 5% of reading, 10⁻⁸ to 2×10⁻² mbar (after 10 min. stabilization) |
| Switching Threshold-On | 2.4×10⁻² mbar |
| Switching Threshold-Off | 3.2×10⁻² mbar |
| Emission Current-Sliding Mode | 5mA (p≤8×10⁻⁷ mbar), 25μA (p>1×10⁻³ mbar) |
| Emission Current-Two-Point Mode | 5mA (p≤7.2×10⁻⁶ mbar), 25μA (3×10⁻⁵ mbar<p<3.2×10⁻² mbar) |
| Degas Emission Current | ≈16mA (Pdegas≈4W) |
| Control Input Signal | 0V/+24V (dc), active high |
| Degas Duration | ≤3min, followed by automatic stop |
| Output Signal | 0 to +10V |
| Measuring Range | +0.57 to +8.176V (5×10⁻¹⁰ to 2×10⁻² mbar) |
| Relationship Voltage-Pressure | 1V/decade, logarithmic |
| Error Signal | +0.1V (EEPROM error), +0.3V (BA sensor error) |
| Minimum Load Impedance | 10kΩ |
| Supply Voltage | +24V (dc) (+20 to +28V) |
| Ripple | ≤2Vp-p |
| Current Consumption-Standard | ≤0.5A |
| Current Consumption-Degas | ≤0.9A |
| Current Consumption-Emission Start | ≤1.4A |
| Power Consumption | ≤18W (standard), ≤21W (EtherCAT) |
| Fuse | 1.25AT |
| Sensor Cable Connection | D-sub 15-pin, male |
| Measuring Cable | Shielded, max. 15-pin plus shielding |
| Cable Length-Analog and Fieldbus Operation | ≤35m (0.25mm²/conductor), ≤50m (0.34mm²/conductor), ≤100m (1.0mm²/conductor) |
| Cable Length-RS232C Operation | ≤30m |
| Switching Functions-Setpoints | SP1, SP2 |
| Adjustment Range | 5×10⁻¹⁰ to 2×10⁻² mbar |
| Relay Contact Rating | ≤60V (dc)/0.5A (dc), resistive |
| Admissible Temperature-Storage | -2 to +70°C |
| Admissible Temperature-Operation | 0 to +50°C |
| Bakeout Temperature | +150°C (at vacuum connection, horizontally mounted) |
| Relative Humidity | ≤65%/85% (no condensation) |
| Interface-Digital | Diagnostic port connection, RS232C, Jack connector |
| Materials Exposed to Vacuum | Stainless steel, NiFe, nickel plated, Hastelloy, glass, iridium, yttrium oxide (Y₂O₃) |
| Internal Volume-DN25 ISO-KF | ≈24cm³ |
| Internal Volume-DN40 CF-R | ≈34cm³ |
| Weight | 550 to 760g |
| Pressure Max. | 5bar (absolute) |
| Mounting Orientation | Any |
| Degree of Pollution | 2 |
| Degree of Protection | IP40 |
| RS232C Data Rate | 9600 Baud |
| RS232C Data Format | Binary, 8 data bits, one stop bit, no parity bit, no handshake |
| EtherCAT Protocol | EtherCAT |
| EtherCAT Communication Standards | ETG.5003 Part 1 Common Device Profile, ETG.5003 Part 2080 Specific Device Profile - Vacuum Pressure Gauge |
| EtherCAT Process Data | Fixed PDO mapping and configurable PDO mapping |
| EtherCAT Connector | RJ45, 8-pin (socket), IN and OUT |
| EtherCAT Cable | Shielded Ethernet CAT5e or higher |
| EtherCAT Cable Length | ≤100m (330ft) |
| EtherCAT Data Rate | 100000Kbps |
Applications
1. Ultra-high vacuum (UHV) measurement 2. High vacuum (HV) measurement 3. Semiconductor manufacturing 4. Research laboratories
Key Features
1. Pure Bayard-Alpert measuring system for wide UHV & HV range 2. Dual filaments for enhanced accuracy 3. Galvanic isolated electronics to avoid stray current 4. Sliding emission mode to prevent pressure jumps 5. Extended bakeability with removable calibration chips 6. Bright OLED display with user interface 7. Analog output, RS232C, EtherCAT compatibility 8. RoHS compliance
Datasheet
Product Datasheet
PDF
Supplier Information
<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>
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