HPG400 High Pressure Pirani Gauge

HPG400 High Pressure Pirani Gauge

Supplier
Inficon
Part Number
HPG400 High Pressure Pirani Gauge
Category
Other
Origin
China

The HPG400 combines high-pressure Pirani technology with robust design, enabling precise pressure measurement from atmospheric pressure to high vacuum levels.

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Overview

The HPG400 combines high-pressure Pirani technology with robust design, enabling precise pressure measurement from atmospheric pressure to high vacuum levels.

Specifications

ParameterValue
Measurement Range (Air, N2)1.5×10⁻⁶…750Torr
Accuracy±15% of reading
Repeatability2% of reading
Hot Cathode Emission, Optional5×10⁻²…1mbar
Optional Component 11mbar
Optional Component 25×10⁻¹mbar
Optional Component 32×10⁻¹mbar
Optional Component 41×10⁻¹mbar
Optional Component 55×10⁻²mbar
Pressure, Maximum2bar (absolute)
Temperature Storage-20…+70°C
Temperature Bakeout at Flange80°C
Temperature Remove Bakeout Electronics150°C
Power Supply Voltage20…28V(dc)
Power Supply Current0.8A(dc)
Measurement Range Hot Cathode1.5…7.5V
Measurement Range Pirani8.5…9.75V
Error Signal Hot Cathode0.3V
Error Signal Pirani0.5V
Voltage per Pressure Typical0.25volts per decade
Minimum Load Resistance10kΩ
Interface (Digital)RS232C
Electrical ConnectionD-Sub, 15-pin, male
Cable Length, Maximum100m (330ft.)
Internal Vacuum MaterialsY₂O₃, Ir, Pt, Mo, Cu, W, NiFe, NiCr, stainless steel, glass
Weight KF/CF430/695g
Protection LevelIP30
ProtocolDeviceNet™, group 2 slave only
MAC ID2 switches (address 00-63) or network programmable
Network Scaleup to 64 nodes per segment
Digital Functionsread pressure, select units: Torr, mbar, Pa; Pirani full scale adjust, monitor gauge status, safe state allows definition of behavior in case of error, detailed alarm and warning information
Analog Functions0…10V analog output pressure indication
Visual Communication IndicatorLED network status (green/red); LED module status (green/red)
Technical SpecificationsDeviceNet™ Vacuum Gauge Device Profile
Device TypeCG for combination gauge
I/O Slave Informationpolling only
Setpoint Relay: Number of Setpoints2
Setpoint Relay: Relay Contactsn.o., potential free
DeviceNet™ ConnectorMicrostyle, 5-pin
Profibus DP ConnectorD-Sub, 9-pin, female
Data Rate Switch125, 250, 500 or network programmable
Cable Length 125kbps500m (1650ft.)
Cable Length 250kbps250m (825ft.)
Cable Length 500kbps100m (330ft.)
Setpoint Relay: Range2×10⁻⁶…100mbar
Setpoint Relay: Full Scale10% of reading
Setpoint Relay: Contact Rating0.5A(dc)
Profibus DP Baud Rate1.5/12MBaud
Profibus DP Address2 switches (address 00-127) or network programmable

Applications

1. Vacuum system installation 2. Semiconductor manufacturing 3. Laboratory research 4. Industrial vacuum processes

Key Features

1. Combines high-pressure Pirani technology with robust design 2. Offers precise pressure measurement from atmospheric pressure to high vacuum 3. User-selectable hot cathode emission range 4. RoHS compliant 5. Compact and space-saving design

Datasheet

Product Datasheet
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Supplier Information

In
Inficon
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<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>

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