HPG400 High Pressure Pirani Gauge
The HPG400 combines high-pressure Pirani technology with robust design, enabling precise pressure measurement from atmospheric pressure to high vacuum levels.
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Overview
The HPG400 combines high-pressure Pirani technology with robust design, enabling precise pressure measurement from atmospheric pressure to high vacuum levels.
Specifications
| Parameter | Value |
|---|---|
| Measurement Range (Air, N2) | 1.5×10⁻⁶…750Torr |
| Accuracy | ±15% of reading |
| Repeatability | 2% of reading |
| Hot Cathode Emission, Optional | 5×10⁻²…1mbar |
| Optional Component 1 | 1mbar |
| Optional Component 2 | 5×10⁻¹mbar |
| Optional Component 3 | 2×10⁻¹mbar |
| Optional Component 4 | 1×10⁻¹mbar |
| Optional Component 5 | 5×10⁻²mbar |
| Pressure, Maximum | 2bar (absolute) |
| Temperature Storage | -20…+70°C |
| Temperature Bakeout at Flange | 80°C |
| Temperature Remove Bakeout Electronics | 150°C |
| Power Supply Voltage | 20…28V(dc) |
| Power Supply Current | 0.8A(dc) |
| Measurement Range Hot Cathode | 1.5…7.5V |
| Measurement Range Pirani | 8.5…9.75V |
| Error Signal Hot Cathode | 0.3V |
| Error Signal Pirani | 0.5V |
| Voltage per Pressure Typical | 0.25volts per decade |
| Minimum Load Resistance | 10kΩ |
| Interface (Digital) | RS232C |
| Electrical Connection | D-Sub, 15-pin, male |
| Cable Length, Maximum | 100m (330ft.) |
| Internal Vacuum Materials | Y₂O₃, Ir, Pt, Mo, Cu, W, NiFe, NiCr, stainless steel, glass |
| Weight KF/CF | 430/695g |
| Protection Level | IP30 |
| Protocol | DeviceNet™, group 2 slave only |
| MAC ID | 2 switches (address 00-63) or network programmable |
| Network Scale | up to 64 nodes per segment |
| Digital Functions | read pressure, select units: Torr, mbar, Pa; Pirani full scale adjust, monitor gauge status, safe state allows definition of behavior in case of error, detailed alarm and warning information |
| Analog Functions | 0…10V analog output pressure indication |
| Visual Communication Indicator | LED network status (green/red); LED module status (green/red) |
| Technical Specifications | DeviceNet™ Vacuum Gauge Device Profile |
| Device Type | CG for combination gauge |
| I/O Slave Information | polling only |
| Setpoint Relay: Number of Setpoints | 2 |
| Setpoint Relay: Relay Contacts | n.o., potential free |
| DeviceNet™ Connector | Microstyle, 5-pin |
| Profibus DP Connector | D-Sub, 9-pin, female |
| Data Rate Switch | 125, 250, 500 or network programmable |
| Cable Length 125kbps | 500m (1650ft.) |
| Cable Length 250kbps | 250m (825ft.) |
| Cable Length 500kbps | 100m (330ft.) |
| Setpoint Relay: Range | 2×10⁻⁶…100mbar |
| Setpoint Relay: Full Scale | 10% of reading |
| Setpoint Relay: Contact Rating | 0.5A(dc) |
| Profibus DP Baud Rate | 1.5/12MBaud |
| Profibus DP Address | 2 switches (address 00-127) or network programmable |
Applications
1. Vacuum system installation 2. Semiconductor manufacturing 3. Laboratory research 4. Industrial vacuum processes
Key Features
1. Combines high-pressure Pirani technology with robust design 2. Offers precise pressure measurement from atmospheric pressure to high vacuum 3. User-selectable hot cathode emission range 4. RoHS compliant 5. Compact and space-saving design
Datasheet
Product Datasheet
PDF
Supplier Information
<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>
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