Edge CDG025D2 with EtherCAT
The Edge CDG025D2 is an unheated capacitive diaphragm gauge designed for precise vacuum measurement in harsh manufacturing environments. It features EtherCAT communication for seamless integration and reliable performance.
Specification Snapshot
Resolution
0.003% FS (1000 Torr, 500...10 Torr, 1 Torr/mbar); 0.01% FS (0.25 Torr/mbar, 0.1 Torr/mbar)
Power Consumption
≤3W (1000 Torr); ≤1W (other models)
EtherCAT Cable Length
≤100m (330ft)
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Overview
The Edge CDG025D2 is an unheated capacitive diaphragm gauge designed for precise vacuum measurement in harsh manufacturing environments. It features EtherCAT communication for seamless integration and reliable performance.
Specifications
| Parameter | Value |
|---|---|
| Accuracy | 0.2% of reading (1000 Torr, 500...10 Torr, 1 Torr/mbar); 0.25% of reading (0.25 Torr/mbar); 0.5% of reading (0.1 Torr/mbar) |
| Temperature Effect Zero | 0.005% FS/°C (1000 Torr, 500...10 Torr); 0.015% FS/°C (1 Torr/mbar); 0.02% FS/°C (0.25 Torr/mbar, 0.1 Torr/mbar) |
| Temperature Effect Full Scale | 0.01% of reading/°C (1000 Torr, 500...10 Torr, 1 Torr/mbar); 0.03% of reading/°C (0.25 Torr/mbar, 0.1 Torr/mbar) |
| Maximum Pressure | 400kPa (1000 Torr); 260kPa (500...10 Torr, 1 Torr/mbar); 130kPa (0.25 Torr/mbar, 0.1 Torr/mbar) |
| Resolution | 0.003% FS (1000 Torr, 500...10 Torr, 1 Torr/mbar); 0.01% FS (0.25 Torr/mbar, 0.1 Torr/mbar) |
| Recommended Minimum Control Pressure | 0.5% FS (all models) |
| Sensor Temperature | 25°C |
| Operating Temperature | +5°C to +50°C |
| Storage Temperature | -20°C to +65°C |
| Power Supply Voltage | +14VDC to +30VDC or ±15VDC (±5%) |
| Power Consumption | ≤3W (1000 Torr); ≤1W (other models) |
| Response Time | 30ms (1000 Torr, 500...10 Torr, 1 Torr/mbar); 130ms (0.25 Torr/mbar, 0.1 Torr/mbar) |
| Protection Class | IP40 |
| Certification Standards | CE |
| Certification Standards | EN |
| Certification Standards | UL |
| Certification Standards | SEMI |
| Certification Standards | RoHS |
| Electrical Connection | D-sub, 15 pole, male |
| Number of Set Points | 2 (SP1, SP2) |
| Relay Contact Voltage | ≤30VDC |
| Relay Contact Current | ≤0.5ADC |
| Relay Contact Full Voltage | 1% FS |
| Protocol | RS232-C, EtherCAT |
| Internal Volume | 4.2cm³ (0.26in³) |
| Weight | 837g (OD 1/2" tube); 852g (DN 16 ISO-KF); 875g (DN 16 CF-R); 897g (8 VCR female) |
| EtherCAT Data Rate | 100000Kbps |
| EtherCAT Cable Length | ≤100m (330ft) |
Applications
1. Semiconductor manufacturing 2. Vacuum coating processes 3. Industrial vacuum systems
Key Features
1. Easy integration with EtherCAT communication 2. High accuracy and stability 3. Compact and robust design 4. Long-term signal stability 5. Temperature compensation 6. Corrosion-resistant ceramic sensor 7. Compliance with CE, EN, UL, SEMI, RoHS standards
Datasheet
Product Datasheet
PDF
Supplier Information
<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>
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