Edge CDG025D2 with EtherCAT

Edge CDG025D2 with EtherCAT

Supplier
Inficon
Part Number
Edge CDG025D2 with EtherCAT
Category
Other
Origin
China

The Edge CDG025D2 is an unheated capacitive diaphragm gauge designed for precise vacuum measurement in harsh manufacturing environments. It features EtherCAT communication for seamless integration and reliable performance.

Specification Snapshot
Resolution
0.003% FS (1000 Torr, 500...10 Torr, 1 Torr/mbar); 0.01% FS (0.25 Torr/mbar, 0.1 Torr/mbar)
Power Consumption
≤3W (1000 Torr); ≤1W (other models)
EtherCAT Cable Length
≤100m (330ft)
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Overview

The Edge CDG025D2 is an unheated capacitive diaphragm gauge designed for precise vacuum measurement in harsh manufacturing environments. It features EtherCAT communication for seamless integration and reliable performance.

Specifications

ParameterValue
Accuracy0.2% of reading (1000 Torr, 500...10 Torr, 1 Torr/mbar); 0.25% of reading (0.25 Torr/mbar); 0.5% of reading (0.1 Torr/mbar)
Temperature Effect Zero0.005% FS/°C (1000 Torr, 500...10 Torr); 0.015% FS/°C (1 Torr/mbar); 0.02% FS/°C (0.25 Torr/mbar, 0.1 Torr/mbar)
Temperature Effect Full Scale0.01% of reading/°C (1000 Torr, 500...10 Torr, 1 Torr/mbar); 0.03% of reading/°C (0.25 Torr/mbar, 0.1 Torr/mbar)
Maximum Pressure400kPa (1000 Torr); 260kPa (500...10 Torr, 1 Torr/mbar); 130kPa (0.25 Torr/mbar, 0.1 Torr/mbar)
Resolution0.003% FS (1000 Torr, 500...10 Torr, 1 Torr/mbar); 0.01% FS (0.25 Torr/mbar, 0.1 Torr/mbar)
Recommended Minimum Control Pressure0.5% FS (all models)
Sensor Temperature25°C
Operating Temperature+5°C to +50°C
Storage Temperature-20°C to +65°C
Power Supply Voltage+14VDC to +30VDC or ±15VDC (±5%)
Power Consumption≤3W (1000 Torr); ≤1W (other models)
Response Time30ms (1000 Torr, 500...10 Torr, 1 Torr/mbar); 130ms (0.25 Torr/mbar, 0.1 Torr/mbar)
Protection ClassIP40
Certification StandardsCE
Certification StandardsEN
Certification StandardsUL
Certification StandardsSEMI
Certification StandardsRoHS
Electrical ConnectionD-sub, 15 pole, male
Number of Set Points2 (SP1, SP2)
Relay Contact Voltage≤30VDC
Relay Contact Current≤0.5ADC
Relay Contact Full Voltage1% FS
ProtocolRS232-C, EtherCAT
Internal Volume4.2cm³ (0.26in³)
Weight837g (OD 1/2" tube); 852g (DN 16 ISO-KF); 875g (DN 16 CF-R); 897g (8 VCR female)
EtherCAT Data Rate100000Kbps
EtherCAT Cable Length≤100m (330ft)

Applications

1. Semiconductor manufacturing 2. Vacuum coating processes 3. Industrial vacuum systems

Key Features

1. Easy integration with EtherCAT communication 2. High accuracy and stability 3. Compact and robust design 4. Long-term signal stability 5. Temperature compensation 6. Corrosion-resistant ceramic sensor 7. Compliance with CE, EN, UL, SEMI, RoHS standards

Datasheet

Product Datasheet
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Supplier Information

In
Inficon
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<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>

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