Cube CDGsci
The INFICON Cube CDGsci is a high-end capacitance diaphragm gauge with exceptional precision (≤0.025% Rd accuracy), excellent repeatability (≤50 ppm FS), and outstanding temperature stability (<5 ppm FS/°C). It is designed as a reference device for standardizing vacuum processes and is ideal for applications requiring high precision and stability.
Specification Snapshot
Response Time
100ms
Resolution
0.003% FS
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Overview
The INFICON Cube CDGsci is a high-end capacitance diaphragm gauge with exceptional precision (≤0.025% Rd accuracy), excellent repeatability (≤50 ppm FS), and outstanding temperature stability (<5 ppm FS/°C). It is designed as a reference device for standardizing vacuum processes and is ideal for applications requiring high precision and stability.
Specifications
| Parameter | Value |
|---|---|
| Accuracy | ≤0.025% Rd |
| Temperature Effect Zero Point | ≤0.0005% FS/°C |
| Temperature Effect Full Scale | ≤0.001% FS/°C |
| Pressure Range | 1000Torr, 100Torr, 1Torr, 100mTorr |
| Maximum Pressure | 3bar (absolute) for 1000Torr, 2.5bar (absolute) for 100Torr and 1Torr, 1.5bar (absolute) for 100mTorr |
| Minimum Detectable Pressure | 0.01% FS for 1000Torr and 100Torr, 0.001% FS for 1Torr and 100mTorr |
| Recommended Minimum Reading | 0.05% FS |
| Operating Temperature (Environment) | +10°C to +40°C |
| Storage Temperature | -10°C to +50°C |
| Power Supply Voltage | +14...+30VDC or ±15VDC (±5%) |
| Power During Heating | ≤15W for 1000Torr and 100Torr, ≤12W for 1Torr and 100mTorr |
| Operating Power | ≤10W for 1000Torr and 100Torr, ≤8W for 1Torr and 100mTorr |
| Response Time | 100ms |
| Protection Class | IP40 |
| CE compliance | EN 61000-6-2/-6-3, EN 61010-1, RoHS |
| ETL Certification | UL 61010-1, CSA 22.2 No.61010-1 |
| SEMI Compliance | SEMI S2 |
| Electrical Connection | D-sub, 15-pin, plug type; 2 x LEMO connectors; FCC compliant |
| Number of Set Points | 2 (SP1, SP2) |
| Relay Contact Voltage | ≤30VDC |
| Relay Contact Current | ≤0.5A |
| Full Scale | 1% FS |
| Diagnostic Port Protocol | Web, REST service, RS232-ASCII |
| Diagnostic Port Readings | Pressure |
| Diagnostic Port Readings | status |
| Diagnostic Port Readings | ID |
| Diagnostic Port Settings | Settings |
| Diagnostic Port Settings | zero adjustment |
| Diagnostic Port Settings | span adjustment |
| Diagnostic Port Settings | factory settings |
| Diagnostic Port Settings | DC offset |
| Materials Exposed to Vacuum | Aluminum Oxide (Al2O3), Stainless Steel (AISI 316L) |
| Internal Volume 1/2" Tube | 4.2cm³ (0.26in³) |
| Internal Volume DN16 ISO-KF | 4.2cm³ (0.26in³) |
| Internal Volume DN16 CF-R | 4.2cm³ (0.26in³) |
| Internal Volume 8 VCR | 4.2cm³ (0.26in³) |
| Weight DN16 ISO-KF | 1670g |
| Weight DN16 CF-R | 1670g |
| Weight 8 VCR | 1670g |
| Resolution | 0.003% FS |
Applications
1. Standardizing vacuum processes 2. High-precision laboratory experiments 3. Industrial vacuum systems
Key Features
1. True high-precision pressure measurement with ceramic technology 2. Perfectly stable output verified by PTB 3. Flexible communication with various modern interfaces 4. Fully integrated functionality without the need for a controller 5. Directly measures vacuum center for optimized gravity center 6. Transmission without the need for a pump
Datasheet
Product Datasheet
PDF
Supplier Information
<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>
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