Cube CDGsci

Cube CDGsci

Supplier
Inficon
Part Number
Cube CDGsci
Category
Other
Origin
China

The INFICON Cube CDGsci is a high-end capacitance diaphragm gauge with exceptional precision (≤0.025% Rd accuracy), excellent repeatability (≤50 ppm FS), and outstanding temperature stability (<5 ppm FS/°C). It is designed as a reference device for standardizing vacuum processes and is ideal for applications requiring high precision and stability.

Specification Snapshot
Response Time
100ms
Resolution
0.003% FS
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Overview

The INFICON Cube CDGsci is a high-end capacitance diaphragm gauge with exceptional precision (≤0.025% Rd accuracy), excellent repeatability (≤50 ppm FS), and outstanding temperature stability (<5 ppm FS/°C). It is designed as a reference device for standardizing vacuum processes and is ideal for applications requiring high precision and stability.

Specifications

ParameterValue
Accuracy≤0.025% Rd
Temperature Effect Zero Point≤0.0005% FS/°C
Temperature Effect Full Scale≤0.001% FS/°C
Pressure Range1000Torr, 100Torr, 1Torr, 100mTorr
Maximum Pressure3bar (absolute) for 1000Torr, 2.5bar (absolute) for 100Torr and 1Torr, 1.5bar (absolute) for 100mTorr
Minimum Detectable Pressure0.01% FS for 1000Torr and 100Torr, 0.001% FS for 1Torr and 100mTorr
Recommended Minimum Reading0.05% FS
Operating Temperature (Environment)+10°C to +40°C
Storage Temperature-10°C to +50°C
Power Supply Voltage+14...+30VDC or ±15VDC (±5%)
Power During Heating≤15W for 1000Torr and 100Torr, ≤12W for 1Torr and 100mTorr
Operating Power≤10W for 1000Torr and 100Torr, ≤8W for 1Torr and 100mTorr
Response Time100ms
Protection ClassIP40
CE complianceEN 61000-6-2/-6-3, EN 61010-1, RoHS
ETL CertificationUL 61010-1, CSA 22.2 No.61010-1
SEMI ComplianceSEMI S2
Electrical ConnectionD-sub, 15-pin, plug type; 2 x LEMO connectors; FCC compliant
Number of Set Points2 (SP1, SP2)
Relay Contact Voltage≤30VDC
Relay Contact Current≤0.5A
Full Scale1% FS
Diagnostic Port ProtocolWeb, REST service, RS232-ASCII
Diagnostic Port ReadingsPressure
Diagnostic Port Readingsstatus
Diagnostic Port ReadingsID
Diagnostic Port SettingsSettings
Diagnostic Port Settingszero adjustment
Diagnostic Port Settingsspan adjustment
Diagnostic Port Settingsfactory settings
Diagnostic Port SettingsDC offset
Materials Exposed to VacuumAluminum Oxide (Al2O3), Stainless Steel (AISI 316L)
Internal Volume 1/2" Tube4.2cm³ (0.26in³)
Internal Volume DN16 ISO-KF4.2cm³ (0.26in³)
Internal Volume DN16 CF-R4.2cm³ (0.26in³)
Internal Volume 8 VCR4.2cm³ (0.26in³)
Weight DN16 ISO-KF1670g
Weight DN16 CF-R1670g
Weight 8 VCR1670g
Resolution0.003% FS

Applications

1. Standardizing vacuum processes 2. High-precision laboratory experiments 3. Industrial vacuum systems

Key Features

1. True high-precision pressure measurement with ceramic technology 2. Perfectly stable output verified by PTB 3. Flexible communication with various modern interfaces 4. Fully integrated functionality without the need for a controller 5. Directly measures vacuum center for optimized gravity center 6. Transmission without the need for a pump

Datasheet

Product Datasheet
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Supplier Information

In
Inficon
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<p>INFICON is a leading provider of innovative instrumentation, critical sensor technologies, and advanced process-control software that enhance productivity and quality in vacuum-based manufacturing. Its analysis, measurement and control products are widely used in semiconductors, thin-film coating, flat-panel displays, solar cells, automotive and refrigeration leak detection, life sciences and more. Headquartered in Switzerland (listed on SIX as IFCN), INFICON established its China operation (a wholly owned subsidiary) with a Shanghai manufacturing plant in 2006 and sales offices in Beijing, Shanghai, Guangzhou and Hong Kong.</p>

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