SQC-310 Thin Film Deposition Controller
The INFICON SQC-310 Thin Film Deposition Controller is an advanced, affordable, and highly accurate device designed for sequential or co-deposition control in thin film applications. It features advanced electronics, an improved display, and a flexible configuration to meet diverse application demands.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Sensor Inputs | two (four optional) |
| Measurement Frequency Range | 6.5 to 10MHz (adjustable) |
| Frequency Resolution | ±0.012Hz at 6MHz |
| Thickness and Rate Resolution/Measurement | ±0.015Å |
| Measurement Interval | 0.10 to 1.0s (adjustable) |
| Rate Display | 0.01Å/s |
| Storage | 100 processes, 1000 layers, 50 films |
| Source Outputs | two (four optional) |
| Output Signal | 0 to ±10V (dc), 15-bit |
| Digital Inputs/Relays | eight/eight (16/16 optional) |
| Digital Inputs | 5V (dc) non-isolated |
| Relays | SPST Form 1A, 30V (dc), 2A maximum |
| Interface(s) | Standard RS-232 and USB (RS-232 and Ethernet optional) |
| Remote Power Control | Optional |
| Display | 1/4 VGA 320x240 active matrix color LCD |
| Graphs | rate |
| Graphs | deviation |
| Graphs | power |
| Graphs | or full screen numeric |
| Power | 100 to 240V (ac), 50/60Hz, 25W |
| Compliance | CE |
| Compliance | RoHS |
| Windows Software | Included |
| Housing/Mounting | 13.3cm (5.25in), half-rack W |
Applications
Key Features
Datasheet
Supplier Information
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