CIM-1201

CIM-1201

Supplier
UlvacShanghai
Part Number
CIM-1201
Category
Material-based Production Equipment
Origin
China

The CIM-1201 is a high-performance vacuum equipment designed for advanced manufacturing processes, offering precision and efficiency in thin-film deposition and other applications.

Specification Snapshot
Dimensions
1200mm x 1500mm x 2000mm
Substrate Size
200mm to 300mm
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Overview

The CIM-1201 is a high-performance vacuum equipment designed for advanced manufacturing processes, offering precision and efficiency in thin-film deposition and other applications.

Specifications

ParameterValue
Vacuum Degree10^-6 Pa
Processing Capacity200 wafers/hour
Power RequirementsAC200V, 50/60Hz
Dimensions1200mm x 1500mm x 2000mm
Weight1500kg
Control SystemPLC-based control system
Temperature rangeRoom temperature to 500°C
Film Thickness Uniformity±1%
Substrate Size200mm to 300mm

Applications

1. Semiconductor manufacturing 2. Thin-film deposition 3. Research and development 4. Optical coatings

Key Features

1. High vacuum performance 2. Advanced control system 3. High throughput 4. Excellent film uniformity 5. Compact design

Datasheet

Product Datasheet
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Supplier Information

Ul
UlvacShanghai
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<p>ULVAC, Inc. is a research and development-oriented comprehensive enterprise based on vacuum technology widely applied in various fields, aiming to create fine processing technology. In 2000, ULVAC Vacuum Technology (Shanghai) Co., Ltd. was established to provide after-sales services such as installation, commissioning, maintenance, and parts sales for ULVAC Group's equipment in China. In 2006, based on ULVAC Vacuum Technology (Shanghai) Co., Ltd., ULVAC Trading (Shanghai) Co., Ltd. was established by integrating the sales network of ULVAC Group in China. In 2014, with the establishment of the Shanghai Free Trade Zone, ULVAC Vacuum Equipment (Shanghai) Co., Ltd., wholly owned by ULVAC Trading (Shanghai) Co., Ltd., was founded to meet customers' foreign currency tax-free transaction needs. The business of ULVAC Trading (Shanghai) Co., Ltd. includes: 1. Equipment sales for flat panel displays (TFT-LCD, AM-OLED, Micro-LED), lithium batteries (EWE, EWG, EWK), integrated circuits (LOGIC, Memory), electronic components (IGBT, SiC power devices, MEMS, SAW/BAW, etc.), touch screens, vacuum metallurgy, vacuum packaging, and R&D; 2. After-sales services: installation, periodic maintenance, repair, parts sales, equipment modification, parts cleaning; 3. Other businesses: sales and after-sales service of domestic and international group company products, sales of various target materials. Since its establishment, the company has set up branches and service centers in Beijing, Shenzhen, Dalian, Suzhou, Chengdu, Hefei, Xi'an, Ordos, Wuhan, Xiamen, Chongqing, and Guangzhou, as well as a cleaning factory in Chaohu, forming a preliminary sales and after-sales service network in mainland China.</p>

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CIM-1201
UlvacShanghai · Material-based Production Equipment
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