SH2 Series Vacuum Gauge

SH2 Series Vacuum Gauge

Supplier
UlvacShanghai
Part Number
SH2 Series Vacuum Gauge
Category
Other
Origin
China

The SH2 Series Vacuum Gauge is a high-precision vacuum measurement device designed for various industrial applications. It features advanced composite ionization technology and supports multiple sensor configurations.

Specification Snapshot
Specification
Standard
Specification
Serial Communication
Sampling Time
70ms
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Overview

The SH2 Series Vacuum Gauge is a high-precision vacuum measurement device designed for various industrial applications. It features advanced composite ionization technology and supports multiple sensor configurations.

Specifications

ParameterValue
ModelSH2-1, SH2-2
SpecificationStandard
SpecificationSerial Communication
Compatible Composite Ionization Vacuum Gauge SensorM-34(NW16), M-35(NW25), M-36(UFC070)
Connectable SensorsSPU
Connectable SensorsSAU
Sampling Time70ms
Output VoltageDC0-10V, LOG 0.75V/1位
Pressure Conversion FormulaP=10^((V-7.25)/0.75+2)
Update Time50ms
Control Input SignalFIL ON/OFF, FIL 1/2, DEGAS ON/OFF
Control Output SignalSensor status
Control Output Signalfilament power monitoring
Serial Communication SpecificationRS232C/RS485
LED DisplaySET1, SET2, SET3
Filament Current1mA(1×10^-3Pa以下), 10μA
DEGASElectron impact degas method, 1mA, 330V
Sensor Pressure Resistance2×10^5Pa
Sensor Internal Volume34cm^3 (M-34)
Operating Temperature Range10-50°C
Operating humidity range15-80% (non-condensing)
Storage Temperature-20-65°C (non-condensing)
IP Protection LevelIP30
Power Supply VoltageDC20-28V
Power Consumption19W max
Input/Output ConnectionD-sub15 Pin
Weight530g (controller), 63g (sensor)
Dimensions WxDxH144mm×75mm×62mm
Composite Ionization Gauge SensorM-34(NW16), M-35(NW25)
Pirani Vacuum Gauge SensorWP-16(NW16)
Atmospheric Pressure SensorSAU(NW16)
Measurement Pressure Range5×10^-8~1×10^5Pa
Measurement Accuracy±15% (5×10^-8~1×10^3Pa), ±30% (1×10^3~3×10^3Pa)
Repeatability±2% (1×10^-6~1×10^1Pa)

Applications

1. Semiconductor manufacturing 2. Vacuum coating processes 3. Research laboratories 4. Industrial vacuum systems

Key Features

1. High precision measurement 2. Multiple sensor compatibility 3. Fast response time 4. Wide pressure range

Datasheet

Product Datasheet
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Supplier Information

Ul
UlvacShanghai
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<p>ULVAC, Inc. is a research and development-oriented comprehensive enterprise based on vacuum technology widely applied in various fields, aiming to create fine processing technology. In 2000, ULVAC Vacuum Technology (Shanghai) Co., Ltd. was established to provide after-sales services such as installation, commissioning, maintenance, and parts sales for ULVAC Group's equipment in China. In 2006, based on ULVAC Vacuum Technology (Shanghai) Co., Ltd., ULVAC Trading (Shanghai) Co., Ltd. was established by integrating the sales network of ULVAC Group in China. In 2014, with the establishment of the Shanghai Free Trade Zone, ULVAC Vacuum Equipment (Shanghai) Co., Ltd., wholly owned by ULVAC Trading (Shanghai) Co., Ltd., was founded to meet customers' foreign currency tax-free transaction needs. The business of ULVAC Trading (Shanghai) Co., Ltd. includes: 1. Equipment sales for flat panel displays (TFT-LCD, AM-OLED, Micro-LED), lithium batteries (EWE, EWG, EWK), integrated circuits (LOGIC, Memory), electronic components (IGBT, SiC power devices, MEMS, SAW/BAW, etc.), touch screens, vacuum metallurgy, vacuum packaging, and R&D; 2. After-sales services: installation, periodic maintenance, repair, parts sales, equipment modification, parts cleaning; 3. Other businesses: sales and after-sales service of domestic and international group company products, sales of various target materials. Since its establishment, the company has set up branches and service centers in Beijing, Shenzhen, Dalian, Suzhou, Chengdu, Hefei, Xi'an, Ordos, Wuhan, Xiamen, Chongqing, and Guangzhou, as well as a cleaning factory in Chaohu, forming a preliminary sales and after-sales service network in mainland China.</p>

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