SH2 Series Vacuum Gauge
The SH2 Series Vacuum Gauge is a high-precision vacuum measurement device designed for various industrial applications. It features advanced composite ionization technology and supports multiple sensor configurations.
Specification Snapshot
Specification
Standard
Specification
Serial Communication
Sampling Time
70ms
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Overview
The SH2 Series Vacuum Gauge is a high-precision vacuum measurement device designed for various industrial applications. It features advanced composite ionization technology and supports multiple sensor configurations.
Specifications
| Parameter | Value |
|---|---|
| Model | SH2-1, SH2-2 |
| Specification | Standard |
| Specification | Serial Communication |
| Compatible Composite Ionization Vacuum Gauge Sensor | M-34(NW16), M-35(NW25), M-36(UFC070) |
| Connectable Sensors | SPU |
| Connectable Sensors | SAU |
| Sampling Time | 70ms |
| Output Voltage | DC0-10V, LOG 0.75V/1位 |
| Pressure Conversion Formula | P=10^((V-7.25)/0.75+2) |
| Update Time | 50ms |
| Control Input Signal | FIL ON/OFF, FIL 1/2, DEGAS ON/OFF |
| Control Output Signal | Sensor status |
| Control Output Signal | filament power monitoring |
| Serial Communication Specification | RS232C/RS485 |
| LED Display | SET1, SET2, SET3 |
| Filament Current | 1mA(1×10^-3Pa以下), 10μA |
| DEGAS | Electron impact degas method, 1mA, 330V |
| Sensor Pressure Resistance | 2×10^5Pa |
| Sensor Internal Volume | 34cm^3 (M-34) |
| Operating Temperature Range | 10-50°C |
| Operating humidity range | 15-80% (non-condensing) |
| Storage Temperature | -20-65°C (non-condensing) |
| IP Protection Level | IP30 |
| Power Supply Voltage | DC20-28V |
| Power Consumption | 19W max |
| Input/Output Connection | D-sub15 Pin |
| Weight | 530g (controller), 63g (sensor) |
| Dimensions WxDxH | 144mm×75mm×62mm |
| Composite Ionization Gauge Sensor | M-34(NW16), M-35(NW25) |
| Pirani Vacuum Gauge Sensor | WP-16(NW16) |
| Atmospheric Pressure Sensor | SAU(NW16) |
| Measurement Pressure Range | 5×10^-8~1×10^5Pa |
| Measurement Accuracy | ±15% (5×10^-8~1×10^3Pa), ±30% (1×10^3~3×10^3Pa) |
| Repeatability | ±2% (1×10^-6~1×10^1Pa) |
Applications
1. Semiconductor manufacturing 2. Vacuum coating processes 3. Research laboratories 4. Industrial vacuum systems
Key Features
1. High precision measurement 2. Multiple sensor compatibility 3. Fast response time 4. Wide pressure range
Datasheet
Product Datasheet
PDF
Supplier Information
<p>ULVAC, Inc. is a research and development-oriented comprehensive enterprise based on vacuum technology widely applied in various fields, aiming to create fine processing technology. In 2000, ULVAC Vacuum Technology (Shanghai) Co., Ltd. was established to provide after-sales services such as installation, commissioning, maintenance, and parts sales for ULVAC Group's equipment in China. In 2006, based on ULVAC Vacuum Technology (Shanghai) Co., Ltd., ULVAC Trading (Shanghai) Co., Ltd. was established by integrating the sales network of ULVAC Group in China. In 2014, with the establishment of the Shanghai Free Trade Zone, ULVAC Vacuum Equipment (Shanghai) Co., Ltd., wholly owned by ULVAC Trading (Shanghai) Co., Ltd., was founded to meet customers' foreign currency tax-free transaction needs. The business of ULVAC Trading (Shanghai) Co., Ltd. includes: 1. Equipment sales for flat panel displays (TFT-LCD, AM-OLED, Micro-LED), lithium batteries (EWE, EWG, EWK), integrated circuits (LOGIC, Memory), electronic components (IGBT, SiC power devices, MEMS, SAW/BAW, etc.), touch screens, vacuum metallurgy, vacuum packaging, and R&D; 2. After-sales services: installation, periodic maintenance, repair, parts sales, equipment modification, parts cleaning; 3. Other businesses: sales and after-sales service of domestic and international group company products, sales of various target materials. Since its establishment, the company has set up branches and service centers in Beijing, Shenzhen, Dalian, Suzhou, Chengdu, Hefei, Xi'an, Ordos, Wuhan, Xiamen, Chongqing, and Guangzhou, as well as a cleaning factory in Chaohu, forming a preliminary sales and after-sales service network in mainland China.</p>
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