ST2

ST2

Supplier
UlvacShanghai
Part Number
ST2
Category
Other
Origin
China

The ST2 series is a high-precision vacuum gauge designed for accurate pressure measurement in various industrial applications. It features advanced sensor technology and robust construction.

Specification Snapshot
Type
Standard type
Type
Communication type
Dimensions WxDxH
Approx. 183.8mm×75mm×62mm
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Overview

The ST2 series is a high-precision vacuum gauge designed for accurate pressure measurement in various industrial applications. It features advanced sensor technology and robust construction.

Specifications

ParameterValue
ModelST2-1, ST2-2
TypeStandard type
TypeCommunication type
Connectable SensorsSPU (optional), SAU (optional)
Pressure Measurement Range1×10^-5~1×10^1Pa (ST2-1), 1×10^-3~3Pa±10% (ST2-2)
Measurement Accuracy1×10^-3~3Pa±10%
Repeatability1×10^-4~3Pa±2%
Sampling Time70ms
OutputDC 0~10V, LOG output 0.75V/1 digit
Update Time50ms
Control Input SignalFIL ON/OFF, FIL 1/2, DEGAS ON/OFF
Control Output SignalSensor report
Control Output Signalfilament monitoring
Serial CommunicationRS232C/RS-485
LED DisplaySET1, SET2, SET3
Emission Current2mA (1×10^-3Pa or less), 10μA
DEGASElectron bombardment method, emission current 2mA, filament voltage 330V
Sensor Pressure Resistance2×10^5Pa
Sensor Internal VolumeSWT-16: 17cm^3
Operating Temperature Range10~50°C
Operating humidity range15~80% (non-condensing)
Storage Temperature-20~65°C (non-condensing)
IP Protection LevelIP30
Power Supply VoltageDC20~28V
Stabilization Time8W, DEGAS 18W
Input/Output ConnectionD-sub15 Pin (M2.6 screw)
Dimensions WxDxHApprox. 183.8mm×75mm×62mm
WeightApprox. 530g (controller), 80g (sensor)
CertificationCE
Sensor TypeSWT-16 (NW16)
Sensor MaterialFilament: Pt-Ir/Y2O3, others: SUS304, Kovar glass
Display Unit1CH: Model ISG1, 4CH: Model IMR1
Display Unit Cable2m, 5m, 10m, 15m, 20m

Applications

1. Semiconductor manufacturing 2. Vacuum coating processes 3. Research laboratories 4. Industrial vacuum systems

Key Features

1. High precision measurement 2. Wide pressure range 3. Fast response time 4. Robust construction

Datasheet

Product Datasheet
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Supplier Information

Ul
UlvacShanghai
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<p>ULVAC, Inc. is a research and development-oriented comprehensive enterprise based on vacuum technology widely applied in various fields, aiming to create fine processing technology. In 2000, ULVAC Vacuum Technology (Shanghai) Co., Ltd. was established to provide after-sales services such as installation, commissioning, maintenance, and parts sales for ULVAC Group's equipment in China. In 2006, based on ULVAC Vacuum Technology (Shanghai) Co., Ltd., ULVAC Trading (Shanghai) Co., Ltd. was established by integrating the sales network of ULVAC Group in China. In 2014, with the establishment of the Shanghai Free Trade Zone, ULVAC Vacuum Equipment (Shanghai) Co., Ltd., wholly owned by ULVAC Trading (Shanghai) Co., Ltd., was founded to meet customers' foreign currency tax-free transaction needs. The business of ULVAC Trading (Shanghai) Co., Ltd. includes: 1. Equipment sales for flat panel displays (TFT-LCD, AM-OLED, Micro-LED), lithium batteries (EWE, EWG, EWK), integrated circuits (LOGIC, Memory), electronic components (IGBT, SiC power devices, MEMS, SAW/BAW, etc.), touch screens, vacuum metallurgy, vacuum packaging, and R&D; 2. After-sales services: installation, periodic maintenance, repair, parts sales, equipment modification, parts cleaning; 3. Other businesses: sales and after-sales service of domestic and international group company products, sales of various target materials. Since its establishment, the company has set up branches and service centers in Beijing, Shenzhen, Dalian, Suzhou, Chengdu, Hefei, Xi'an, Ordos, Wuhan, Xiamen, Chongqing, and Guangzhou, as well as a cleaning factory in Chaohu, forming a preliminary sales and after-sales service network in mainland China.</p>

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