X-BOT-50
X-BOT-50 is a compact six-degree-of-freedom motion platform with a height of 60mm, designed for precise positioning and adjustment of components. It offers sub-micron resolution and supports 360° rotation along the Z-axis, making it suitable for integration with load-bearing systems. The device is available in vacuum (HV), ultra-high vacuum (UHV), and non-magnetic versions, with customizable travel ranges.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Travel Range Tx,Ty(mm) | ±14 |
| Travel Range Tz(mm) | ±2.5 |
| Travel Range Rx(deg) | ±9 |
| Travel Range Ry(deg) | ±10 |
| Travel Range Rz(deg) | ±360 (optional PR-20) |
| Weight(g) | 250 |
| Motor | Piezoelectric motor |
| Maximum Speed | 5mm/s, 10deg/s (MMC-110) |
| Encoder | Digital incremental (RS-422), Absolute (BiSS) |
| Resolution Tx,Ty,Tz(nm) | 20 |
| Resolution Rx,Ry,Rz(μdeg) | 100 |
| Repeatability Tx,Ty,Tz(nm) | ±200 |
| Repeatability Rx,Ry,Rz(μdeg) | 200 |
| Material | Aluminum alloy, copper guide rail (optional stainless steel, titanium materials) |
| 最大负载Fx[N][$]Maximum Load Fx(N) | 2 |
| 最大负载Fy[N][$]Maximum Load Fy(N) | 2 |
| 最大负载Fz[N][$]Maximum Load Fz(N) | 3 |
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