SYJK-6ZFC-1NS
SYJK-6ZFC-1NS is a precision motion control system designed for high-accuracy applications requiring macro and micro motion capabilities.
Specification Snapshot
No-load Resonant Frequency X/Y
500Hz
No-load Resonant Frequency Z
1400Hz
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Overview
SYJK-6ZFC-1NS is a precision motion control system designed for high-accuracy applications requiring macro and micro motion capabilities.
Specifications
| Parameter | Value |
|---|---|
| Travel Range X/Y | 110mm |
| Travel Range Z | 60mm |
| Positioning Accuracy X/Y | ±0.3μm |
| Positioning Accuracy Z | ±0.25μm |
| Bidirectional Repeatability X/Y | ±0.1μm |
| Bidirectional Repeatability Z | ±0.1μm |
| Straightness/Flatness X/Y | ±1.5μm |
| Straightness/Flatness Z | ±1.5μm |
| Pitch/Yaw X/Y | 12arcsec |
| Pitch/Yaw Z | 10arcsec |
| Micro Travel Range X/Y | 100μm |
| Micro Travel Range Z | 20μm |
| Closed-loop Resolution X/Y | 0.5nm |
| Closed-loop Resolution Z | 0.1nm |
| Linearity X/Y | 0.02% |
| Linearity Z | 0.08% |
| No-load Resonant Frequency X/Y | 500Hz |
| No-load Resonant Frequency Z | 1400Hz |
| Maximum Load X/Y | 1kg |
| Maximum Load Z | 1kg |
Applications
1. Precision manufacturing 2. Optical alignment 3. Semiconductor processing 4. Scientific research
Key Features
1. High precision positioning 2. Dual macro and micro motion capabilities 3. Compact design for space-saving integration 4. High load capacity
Datasheet
Product Datasheet
PDF
Supplier Information
<p>Sanying MotionControl Instruments Ltd., based in Tianjin, is a professional manufacturer of ultra-precision motion control technology and products. The company provides nano positioning stages, piezo actuators, nano capacitive sensors, high-precision air bearing stages, and microscope stages for semiconductor, scientific research, biomedical and optoelectronic applications, with over 100 patents and national standard contributions.</p>
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