NS-XY100Z100-01
The NS-XY100Z100-01 is a precision motion control platform designed for high-accuracy applications. It features a compact design and advanced electrical sensors for precise movement along the X, Y, and Z axes.
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Overview
The NS-XY100Z100-01 is a precision motion control platform designed for high-accuracy applications. It features a compact design and advanced electrical sensors for precise movement along the X, Y, and Z axes.
Specifications
| Parameter | Value |
|---|---|
| Motion Axes | X/Y/Z |
| Closed-loop Travel (μm) | 100100/100 |
| Closed-loop Resolution (nm) | 0.5/0.5/0.5 |
| Linearity (%) | 0.02/0.02/0.04 |
| No-load Resonant Frequency (Hz) | 400/400/400 |
| Port | D-sub15 |
| Maximum Load (kg) | 5kg |
| Self Weight (kg) | 0.9kg |
| Dimensions (mm) | 140×140×39.2 |
| Compatible Controller | SC100-A/SC300-3/SC400-3 |
Applications
1. Precision measurement 2. Semiconductor manufacturing 3. Optical experiments
Key Features
1. High precision closed-loop resolution 2. Compact design for space-saving applications 3. High load capacity up to 5kg 4. Durable aluminum alloy construction
Datasheet
Product Datasheet
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Supplier Information
SYMC (Tianjin) Instrument Equipment Co., Ltd. is a professional manufacturer focusing on ultra-precision motion control technology and products. We are committed to providing innovative products and solutions for ultra-precision motion control technology for the manufacturing of high-end equipment and the research and development of scientific research instruments. Adhering to the purpose of "high-end innovation, lean manufacturing" and the goal of "building an international brand of China's high-end manufacturing", we provide key technologies and build a solid foundation for the upgrading of China's high-end manufacturing equipment industry, and realize the localization of core technology equipment.
SYMC (Tianjin) Instrument Equipment Co., Ltd. has reached the international advanced level in nano motion control technology and owns complete independent intellectual property rights. The company's core technology integrates precision sensing, precision driving, precision machinery, precision control, precision measurement and precision integration, and the comprehensive indicators of products have reached the international advanced level. The company provides a series of products and complete solutions including high-precision nano positioning platforms, high-speed tip-tilt mirrors, piezoelectric actuators, nano capacitive displacement sensors, high-precision air bearing platforms, piezoelectric driven positioning platforms, micro positioning platforms, microscope stages and precision motion control integration.
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