NNS-XY100RZ2-01
The NNS-XY100RZ2-01 is a precision capacitive sensor-based motion platform designed for high-resolution and stable performance in X/Y and Rz axes.
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Overview
Specifications
| Parameter | Value |
|---|---|
| Motion Axis | X/Y, Rz |
| Sensor Type | 电容式 |
| Closed-loop Travel | 100μm/100μm, ±1mrad |
| Closed-loop Resolution | 0.5nm/0.5nm, 0.1μrad |
| No-load Resonant Frequency (Hz) | 750/750, 750 |
| Loaded Resonant Frequency (360g) (Hz) | 450/450, 450 |
| Linearity (%) | 0.03/0.03, 0.05 |
| Port | D-sub15 |
| Material | Aluminum alloy |
| Weight (kg) | 1.1 |
| Dimensions (mm) | 150×150×28.5 |
| Compatible Controller | SC500-4 |
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Key Features
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Supplier Information
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